The charge accumulation processes of an organic insulator during monoatomic ion and cluster ion bombardments were studied by simultaneously measuring the target and secondary emission currents as functions of atomic dose. A series of abrupt changes in the currents was observed during bombardment, indicating repeated charge accumulation and electric breakdown. For bombardment, the emitting current was equilibrated with the injecting current at a dose of about The charge equilibrium prevented subsequent charge accumulation on the target and electric breakdown. By combining the cluster bombardment with the application of a suitable external electric field upon the target, the charge accumulation problem was completely eliminated.
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