The charge accumulation processes of an organic insulator during monoatomic ion C1+ and cluster ion C8+ bombardments were studied by simultaneously measuring the target and secondary emission currents as functions of atomic dose. A series of abrupt changes in the currents was observed during C1+ bombardment, indicating repeated charge accumulation and electric breakdown. For C8+ bombardment, the emitting current was equilibrated with the injecting current at a dose of about 1013 atoms/cm2. The charge equilibrium prevented subsequent charge accumulation on the target and electric breakdown. By combining the cluster bombardment with the application of a suitable external electric field upon the target, the charge accumulation problem was completely eliminated.

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