A tantalum–pentoxide dielectric with an enhanced permittivity of over 50 was found to be crystallized in a hexagonal symmetry with a=0.628 nm and c=0.389 nm. The incommensurate epitaxy of tantalum pentoxide on hcp-ruthenium metal stabilizes the hexagonal phase with √3-time periodicity in plane, as compared with that of the known hexagonal δ phase. The crystallographic assumption, which is based on one-dimensional Ta–O–Ta chain along the c axis, can explain large polarizability caused by delocalized electrons on the one-dimensional chain.

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