A tantalum–pentoxide dielectric with an enhanced permittivity of over 50 was found to be crystallized in a hexagonal symmetry with and The incommensurate epitaxy of tantalum pentoxide on hcp-ruthenium metal stabilizes the hexagonal phase with periodicity in plane, as compared with that of the known hexagonal δ phase. The crystallographic assumption, which is based on one-dimensional Ta–O–Ta chain along the axis, can explain large polarizability caused by delocalized electrons on the one-dimensional chain.
REFERENCES
1.
Y. Ohji, S. Iijima, A. Saito, H. Miki, M. Kanai, M. Kunitomo, S. Yamamoto, R. Furukawa, Y. Sugawara, T. Uemura, J. Kuroda, M. Nakata, T. Kisu, T. Kawagoe, K. Kawakita, M. Hasegawa, M. Nakamura, K. Kajigaya, M. Hidaka, H. Yamamoto, I. Asano, and E. Takeda, Extended abstracts of 37th Annual International Reliability Physics Symposium (IRPS, San Diego, 1999), p. 12.
2.
3.
K.
Kishiro
, N.
Inoue
, S.
Chen
, and M.
Yoshimaru
, Jpn. J. Appl. Phys., Part 1
37
, 1336
(1998
).4.
H. Shinriki, M. Hiratani, A. Nakao, and S. Tachi, Extended Abstracts of the 1991 International Conference on Solid State Devices and Materials (SSDM, Yokohama, Japan, 1991), p. 198.
5.
6.
N. C.
Stephenson
and R. S.
Roth
, Acta Crystallogr., Sect. B: Struct. Crystallogr. Cryst. Chem.
B27
, 1037
(1971
).7.
8.
9.
O.
Yamaguchi
, D.
Tomihisa
, T.
Uegaki
, and K.
Shimizu
, J. Am. Ceram. Soc.
70
, C335
(1987
).10.
11.
12.
V. I.
Khitrova
, V. V.
Klechkovskaya
, and Z. G.
Pinsker
, Sov. Phys. Crystallogr.
24
, 537
(1979
).13.
14.
15.
16.
This content is only available via PDF.
© 2002 American Institute of Physics.
2002
American Institute of Physics
You do not currently have access to this content.