Fast ultraviolet photoresponse is observed in ZnO thin films prepared by unbalanced magnetron sputtering. Films with a porous microstructure and a mixed (100), (002) and (101) crystallographic orientation exhibit photoresponse with good linearity and minimal aging effects. A fast rise time of 792 ms and a fall time of 805 ms are observed under low intensity (9.5 mW/cm2, λ=365 nm) ultraviolet light.

Topics
Ultraviolet light, Magnetron sputtering, Thin films, Metal oxides
1.
H.
Fabricius
,
T.
Skettrup
, and
P.
Bisgaard
,
Appl. Opt.
25
,
2764
(
1986
).
Google Scholar
 
2.
Y.
Liu
,
C. R.
Gorla
,
S.
Liang
,
N.
Emanetoglu
,
Y.
Lu
,
H.
Shen
, and
M.
Wraback
,
J. Electron. Mater.
29
,
69
(
2000
).
Google Scholar
 
3.
S. A.
Studenikin
,
N.
Golego
, and
M.
Cocivera
,
J. Appl. Phys.
87
,
2413
(
2000
).
Google Scholar
 
4.
D. H.
Zhang
,
J. Phys. D
28
,
1273
(
1995
).
Google Scholar
 
5.
E. Mollow, Photoconductivity Conference, edited by R. G. Breckenridge (Wiley, New York, 1954), p. 509.
6.
A. M.
Fernandez
and
P. J.
Sebastian
,
J. Phys. D
26
,
2001
(
1993
).
Google Scholar
 
7.
D. H.
Zhang
and
D. E.
Brodie
,
Thin Solid Films
238
,
95
(
1994
).
Google Scholar
 
8.
D. H.
Zhang
and
D. E.
Brodie
,
Thin Solid Films
251
,
151
(
1994
).
Google Scholar
 
9.
A. E.
Jimenez-Gonzailez
and
P. K.
Nair
,
Semicond. Sci. Technol.
10
,
1277
(
1995
).
Google Scholar
 
10.
Y.
Takahashi
,
M.
Kanamori
,
A.
Kondoh
,
H.
Minoura
, and
Y.
Ohya
,
Jpn. J. Appl. Phys., Part 1
33
,
6611
(
1994
).
Google Scholar
 
11.
B.
Window
and
N.
Savvides
,
J. Vac. Sci. Technol. A
4
,
196
(
1986
).
Google Scholar
 
12.
K.
Tominaga
,
N.
Ueshiba
,
Y.
Shintani
, and
O.
Tada
,
Jpn. J. Appl. Phys., Part 1
20
,
519
(
1981
).
Google Scholar
 
13.
C. R.
Aita
,
R. J.
Lad
, and
T. C.
Tisone
,
J. Appl. Phys.
51
,
6405
(
1980
).
Google Scholar
 
This content is only available via PDF.
© 2002 American Institute of Physics.
2002
American Institute of Physics
You do not currently have access to this content.