Focused-electron-beam-deposited carbon atomic-force microscope tips were characterized using flexural vibrations excited with piezoelectric transducers and observed directly inside a scanning electron microscope. Frequencies in the high-MHz range were measured and the elastic modulus was estimated to be
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A parallel and similar measurement was performed on focused-ion-beam deposited carbon structures and gave a similar result that was presented by Fujita et al. at ’EIPBN 2001 Washington, DC, abstract, pp. 291–292, J. Vac. Sci. Technol. B 19, 2834 (2001).
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