The exchange-biased electrode of magnetic tunneling junctions with under- and overoxidized AlOx insulator layers were annealed at 300 °C to study the extent of the Mn diffusion. A significant amount of Mn diffusion into the AlOx layer was observed in the overoxidized junction sample from Auger electron spectroscopy and the extent of Mn diffusion increased with increasing oxidation time. X-ray photoelectron spectroscopy (XPS) proved that Mn found at the CoFe/AlOx interface in the overoxidized junction sample was in the form of Mn oxide. The XPS data suggest that the Mn diffusion was accelerated by the preferential oxidation of Mn at the CoFe/AlOx interface.

1.
S. S. P.
Parkin
,
K. P.
Roche
,
M. G.
Samant
,
P. M.
Rice
,
R. B.
Beyers
,
R. E.
Scheuerlein
,
E. J.
O’Sullivan
,
S. L.
Brown
,
J.
Bucchigano
,
D. W.
Abraham
,
Yu
Lu
,
M.
Rocks
,
P. L.
Trouilloud
,
R. A.
Wanner
, and
W. J.
Gallagher
,
J. Appl. Phys.
85
,
5828
(
1999
).
Google Scholar
 
2.
J. S.
Moodera
,
J.
Nowak
, and
J. M.
Van De Veerdonk
,
Phys. Rev. Lett.
80
,
2941
(
1998
).
Google Scholar
 
3.
T.
Miyazaki
and
N.
Tezuka
,
J. Magn. Magn. Mater.
139
,
L231
(
1995
).
Google Scholar
 
4.
S.
Tehrani
,
J. M.
Slaughter
,
E.
Chen
,
M.
Durlam
,
J.
Shi
, and
M.
DeHerrera
,
IEEE Trans. Magn.
35
,
2814
(
1999
).
Google Scholar
 
5.
S.
Cardoso
,
P. P.
Freitas
,
C.
de Jesus
,
P.
Wei
, and
J. C.
Soares
,
Appl. Phys. Lett.
76
,
610
(
2000
).
Google Scholar
 
6.
H.
Kikuchi
,
M.
Sato
, and
K.
Kobayashi
,
J. Appl. Phys.
87
,
6055
(
2000
).
Google Scholar
 
7.
J. H.
Lee
,
H. D.
Jeong
,
H.
Kyung
,
C. S.
Yoon
,
C. K.
Kim
,
B. G.
Park
, and
T. D.
Lee
,
J. Appl. Phys.
91
,
217
(
2002
).
Google Scholar
 
8.
J. H.
Lee
,
H. D.
Jeong
,
C. S.
Yoon
,
C. K.
Kim
,
B. G.
Park
, and
T. D.
Lee
,
J. Appl. Phys.
91
,
1431
(
2002
).
Google Scholar
 
9.
B. G.
Park
and
T. D.
Lee
,
IEEE Trans. Magn.
35
,
2919
(
1999
).
Google Scholar
 
10.
A. E. T.
Kuiper
,
M. F.
Gillies
,
V.
Kottler
,
G. W.
’t Hooft
,
J. G. M.
van Berkum
,
C.
Van der Marel
,
Y.
Tamminga
, and
J. H. M.
Snijders
,
J. Appl. Phys.
89
,
1965
(
2001
).
Google Scholar
 
11.
D. J.
Keavney
,
S.
Park
, and
C. M.
Falco
,
Appl. Phys. Lett.
78
,
234
(
2001
).
Google Scholar
 
12.
J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, in Handbook of X-ray Photoelectron Spectroscopy, edited by J. Chastain and R. C. King, Jr. (Physical Electronics, Inc., 1995).
13.
The Oxide Handbook, 2nd ed., edited by G. V. Samsonov (IFI/Plenum, New York, 1982), p. 45.
14.
S.
Baunack
and
W.
Brückner
,
Mikrochim. Acta
133
,
17
(
2000
).
Google Scholar
 
This content is only available via PDF.
© 2002 American Institute of Physics.
2002
American Institute of Physics
You do not currently have access to this content.