X-ray reflectivity and diffraction measurements were performed on Ga-face AlGaN/GaN heterostructures to determine the influence of interface roughness scattering and GaN domain boundaries scattering on the electron mobility of polarization induced two-dimensional electron gases. From simulations of the specular reflectivity, the root-mean-square roughness of the AlGaN/GaN interfaces was obtained. In reciprocal space maps, laterally elongated streaks passing through the Bragg peaks have been observed, which are attributed to column-like domains in the GaN buffer layers. The relationship between electron mobility measured by Hall effect and the interface roughness on one hand, and the column domain size on the other hand, demonstrates that the interface roughness scattering is not limiting the electron mobility, whereas the transport properties of the two-dimensional electron gas degrade with decreasing size of columnar domains in the GaN layer.

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