We report on the fabrication and characterization of low dark-current GaN metal–semiconductor–metal (MSM) photodiodes. Their quantum efficiency in the vacuum-ultraviolet range has been analyzed, demonstrating that these devices are an excellent choice for high-energy photodetection. Models to explain and control the performance as a function of residual doping and geometry are applied to GaN-based MSM photodiodes.

1.
J.-F.
Hochedez
,
P.
Bergonzo
,
M.-C.
Catex
,
P.
Dhez
,
O.
Hainaut
,
M.
Sacchi
,
J.
Alvarez
,
H.
Boyer
,
A.
Deneuville
,
P.
Gibart
,
B.
Guizard
,
J.-P.
Kleider
,
P.
Lemaire
,
C.
Mer
,
E.
Monroy
,
E.
Muñoz
,
P.
Muret
,
F.
Omnès
,
J. L.
Pau
,
V.
Ralchenko
,
D.
Tromson
,
E.
Verwichte
, and
J.-C.
Vial
,
Diamond Relat. Mater.
10
,
673
(
2001
).
Google Scholar
 
2.
E.
Monroy
,
F.
Calle
,
J. L.
Pau
,
F. J.
Sánchez
,
E.
Muñoz
,
F.
Omnès
,
B.
Beaumont
, and
P.
Gibart
,
J. Appl. Phys.
88
,
2081
(
2000
).
Google Scholar
 
3.
E.
Monroy
,
F.
Calle
,
E.
Muñoz
, and
F.
Omnès
,
Appl. Phys. Lett.
74
,
3401
(
1999
).
Google Scholar
 
4.
J. C.
Carrano
,
T.
Li
,
P. A.
Grudowski
,
C. J.
Eiting
,
R. D.
Dupuis
, and
J. C.
Campbell
,
J. Appl. Phys.
72
,
542
(
1998
).
Google Scholar
 
5.
E.
Monroy
,
M.
Hamilton
,
D.
Walker
,
P.
Kung
,
F. J.
Sánchez
, and
M.
Razeghi
,
Appl. Phys. Lett.
74
,
1171
(
1999
).
Google Scholar
 
6.
A.
Motogaito
,
M.
Yamaguchi
,
K.
Hiramatsu
,
M.
Kotoh
,
Y.
Ohuchi
,
K.
Tadatomo
,
Y.
Hamamura
, and
K.
Fukui
,
Jpn. J. Appl. Phys., Part 2
40
,
L368
(
2001
).
Google Scholar
 
7.
A.
Motogaito
,
K.
Ohta
,
K.
Hiramatsu
,
Y.
Ohuchi
,
K.
Tadatomo
,
Y.
Hamamura
, and
K.
Fukui
,
Phys. Status Solidi A
188
,
337
(
2001
).
Google Scholar
 
8.
F.
Omnès
,
N.
Marenco
,
B.
Beaumont
,
P.
De Mierry
,
E.
Monroy
,
F.
Calle
, and
E.
Muñoz
,
J. Appl. Phys.
86
,
5286
(
1999
).
Google Scholar
 
9.
E.
Monroy
,
F.
Calle
,
E.
Muñoz
, and
F.
Omnès
,
Phys. Status Solidi A
176
,
157
(
1999
).
Google Scholar
 
10.
S. M.
Sze
,
D. J.
Coleman
, Jr., and
A.
Loya
,
Solid-State Electron.
14
,
1209
(
1971
).
Google Scholar
 
11.
G.
de Cesare
,
F.
Irrera
,
F.
Palma
,
G.
Naletto
,
P.
Nicolosi
, and
E.
Janniti
,
Appl. Opt.
36
,
2751
(
1997
).
Google Scholar
 
12.
L. W.
Cahill
,
Proc. SPIE
2999
,
78
(
1997
).
Google Scholar
 
13.
J. C.
Carrano
,
T.
Li
,
D. L.
Brawn
,
P. A.
Grudowski
,
C. J.
Eiting
,
R. D.
Dupuis
, and
J. C.
Campbell
,
Appl. Phys. Lett.
73
,
2405
(
1998
).
Google Scholar
 
This content is only available via PDF.
© 2002 American Institute of Physics.
2002
American Institute of Physics
You do not currently have access to this content.