The effect of hydrogen on the incorporation of nitrogen in GaAs1−yNy grown by metalorganic chemical vapor deposition (MOCVD) is reported. Nitrogen content as high as y=0.081 has been achieved when the use of H2 is completely avoided in the MOCVD growth of GaAs1−yNy. When H2 is added to the growth ambient, the value of y in GaAs1−yNy decreases as the relative percent of H2 in the carrier gas increases. We will report on the properties of these GaAsN films and discuss the nature of the effect that H2 has on modulating the N content in these films.

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