(103) fiber-textured thin films have been grown on Pt-coated Si substrates using a buffer layer. High-resolution transmission electron microscopy reveals that the fiber texture arises from the local epitaxial growth of (111) grains on (111) Pt grains and in turn (103) grains on (111) grains. The films exhibit remanent polarization values of 9 The uniform grain orientation (fiber texture) should minimize grain-to-grain variations in the remanent polarization, which is important to continued scaling of ferroelectric memory device structures.
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