The growth, fabrication, and characterization of ultraviolet metal–semiconductor–metal (MSM) GaN photodetectors grown on LiGaO2 by molecular-beam epitaxy are reported herein. GaN/LiGaO2 material with dislocation densities of approximately 108cm−2 and x-ray diffraction (00.4) full width at half maximum of 75 arcsec results in MSMs showing high responsivity, 0.105 A/W, at a reverse bias voltage of 20 V at 308 nm, and low dark currents of 7.88 pA at a 60 V reverse bias. Given the etch selectivity of the GaN/LiGaO2 system and the excellent performance of these devices, GaN device integration onto alternative substrates appears promising.

1.
W.
Doolittle
,
S.
Kang
, and
A.
Brown
,
Solid-State Electron.
44
,
229
(
2000
).
2.
S.
Kang
,
W.
Doolittle
,
A.
Brown
, and
S.
Stock
,
Appl. Phys. Lett.
74
,
3380
(
1999
).
3.
W.
Wong
,
T.
Sands
, and
N.
Cheung
,
Appl. Phys. Lett.
72
,
599
(
1998
).
4.
S. M. Sze, Physics of Semiconductor Devices, 2nd ed. (Wiley, New York, 1981), p. 615, Eq. (68).
5.
J. C.
Carrano
,
T.
Li
,
P. A.
Grudowski
,
C. J.
Eiting
,
R. D.
Dupuis
, and
J. C.
Campbell
,
J. Appl. Phys.
83
,
6148
(
1998
).
6.
K. S.
Stevens
,
M.
Kinnibugh
, and
R.
Beresford
,
Appl. Phys. Lett.
66
,
3518
(
1995
).
7.
S. F.
Soares
,
Jpn. J. Appl. Phys., Part 1
31
,
210
(
1992
).
8.
J.
Burm
and
L. F.
Eastman
,
IEEE Photonics Technol. Lett.
8
,
113
(
1996
).
9.
E.
Monroy
,
F.
Calle
,
E.
Mũnoz
, and
F.
Omnes
,
Phys. Status Solidi A
176
,
157
(
1999
).
This content is only available via PDF.
You do not currently have access to this content.