The structural properties of high-quality films grown by plasma-enhanced molecular-beam epitaxy are investigated by x-ray diffraction and transmission electron microscopy. The only defects encountered are threading dislocations with a density of Most numerous dislocations are pure-edge dislocations (Burgers vector of which accommodate slight in-plane misorientations between subgrains. The oxygen polarity of these films is also established.
REFERENCES
1.
Y. J.
Kim
, Y. T.
Kim
, H. K.
Yang
, J. C.
Park
, J. I.
Hand
, Y. E.
Lee
, and H. J.
Kim
, J. Vac. Sci. Technol. A
15
, 1103
(1997
).2.
V.
Craciun
, J.
Elders
, J. G. E.
Gardeniers
, and I. W.
Boyd
, Appl. Phys. Lett.
65
, 2963
(1994
).3.
M. A. L.
Johnson
, S.
Fujita
, W. H.
Rowland
, Jr., W. C.
Hughes
, J. W.
Cook
, Jr., and J. F.
Schetzina
, J. Electron. Mater.
25
, 855
(1996
).4.
D. M.
Bagnall
, Y. F.
Chen
, Z.
Zhu
, T.
Yao
, S.
Koyama
, M. Y.
Shen
, and T.
Goto
, Appl. Phys. Lett.
70
, 2230
(1997
).5.
D. F.
Croxall
, R. C. C.
Ward
, C. A.
Wallace
, and R. C.
Kell
, J. Cryst. Growth
22
, 117
(1974
).6.
Y.
Chen
, D. M.
Bagnall
, H.-J.
Koh
, K.-T.
Park
, K.
Hiraga
, Z.
Zhu
, and T.
Yao
, J. Appl. Phys.
84
, 3912
(1998
).7.
P.
Fons
, K.
Iwata
, S.
Niki
, A.
Yamada
, K.
Matsubara
, and M.
Watanabe
, J. Cryst. Growth
209
, 532
(2000
).8.
S.-H.
Lim
, D.
Shindo
, H.-B.
Kang
, and K.
Nakamura
, J. Vac. Sci. Technol. B
19
, 506
(2001
).9.
P.
Fons
, K.
Iwata
, A.
Yamada
, K.
Matsubara
, S.
Niki
, K.
Nakahara
, T.
Tanabe
, and H.
Takasu
, Appl. Phys. Lett.
77
, 1801
(2000
).10.
X. H.
Wu
, L. M.
Brown
, D.
Kapolnek
, S.
Keller
, B.
Keller
, S. P.
DenBaars
, and J. S.
Speck
, J. Appl. Phys.
80
, 3228
(1996
).11.
12.
13.
T.
Ohnishi
, A.
Ohtomo
, M.
Kawasaki
, K.
Takahashi
, M.
Yoshimoto
, and H.
Koinuma
, Appl. Phys. Lett.
72
, 824
(1998
).14.
H.
Tews
, R.
Averbeck
, A.
Graber
, and H.
Riechert
, Electron. Lett.
32
, 2004
(1996
).15.
L. T.
Romano
, J. E.
Northrup
, and M. A.
O’Keefe
, Appl. Phys. Lett.
69
, 2394
(1996
).16.
K.
Sakurai
, M.
Kanehiro
, K.
Nakahara
, T.
Tanabe
, Sz.
Fujita
, and Sg.
Fujita
, J. Cryst. Growth
209
, 522
(2000
).
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