The structural properties of high-quality films grown by plasma-enhanced molecular-beam epitaxy are investigated by x-ray diffraction and transmission electron microscopy. The only defects encountered are threading dislocations with a density of Most numerous dislocations are pure-edge dislocations (Burgers vector of which accommodate slight in-plane misorientations between subgrains. The oxygen polarity of these films is also established.
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© 2001 American Institute of Physics.
2001
American Institute of Physics
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