Room-temperature Hall effect measurements of (0001) Mg-doped GaN films grown on sapphire substrates by metalorganic chemical vapor deposition show a reduction in hole concentration for Mg concentrations greater than 1020cm−3. A combination of secondary ion mass spectrometry and transmission electron microscopy indicates a steadily increasing Mg incorporation during growth and the formation of inversion domains at these high concentrations. We discuss mechanisms that could give rise to a reduction of the hole concentration at high Mg doping levels.

1.
S.
Nakamura
,
M.
Senoh
, and
T.
Mukai
,
Jpn. J. Appl. Phys., Part 2
30
,
L1708
(
1991
).
2.
D.
Bour
,
M.
Kneissl
,
W.
Goetz
,
L. T.
Romano
,
C. G.
Van de Walle
,
J. E.
Northrup
,
R. M.
Donaldson
,
J.
Walker
, and
N. M.
Johnson
,
Mater. Res. Soc. Symp. Proc.
449
,
509
(
1997
).
3.
I. P.
Smorchkova
,
E.
Haus
,
B.
Heying
,
P.
Kozodoy
,
P.
Fini
,
J. P.
Ibbetson
,
S.
Keller
,
S. P.
DenBaars
,
J. S.
Speck
, and
U. K.
Mishra
,
Appl. Phys. Lett.
76
,
718
(
2000
).
4.
V.
Ramachandran
,
R. M.
Feenstra
,
W. L.
Sarney
,
L.
Salamanca-Riba
,
J. E.
Northrup
,
L. T.
Romano
, and
D. W.
Greve
,
Appl. Phys. Lett.
75
,
808
(
1999
).
5.
L. T.
Romano
,
J. E.
Northrup
,
A. J.
Ptak
, and
T. H.
Myers
,
Appl. Phys. Lett.
77
,
2479
(
2000
).
6.
A. J.
Ptak
,
T. H.
Myers
,
L. T.
Romano
,
C. G.
Van de Walle
, and
J. E.
Northrup
,
Appl. Phys. Lett.
78
,
285
(
2001
).
7.
P. B. Hirsch, A. Howie, R. Nicholson, D. Pashley, and M. Whelan, Electron Microscopy of Thin Crystals (Krieger, Malabar, FL 1977).
8.
L. T.
Romano
,
J. E.
Northrup
, and
M. A.
O’Keefe
,
Appl. Phys. Lett.
69
,
2394
(
1996
).
9.
A.
Valilonis
,
G.
Glass
,
P.
Desjardins
,
D. G.
Cahill
, and
J. E.
Greene
,
Phys. Rev. Lett.
82
,
4464
(
1999
);
G. Glass (private communication).
10.
D. D.
Perovic
,
G. C.
Weatherly
,
R. F.
Egerton
,
D. C.
Houghton
, and
T. E.
Jackman
,
Philos. Mag. A
63
,
757
(
1991
).
11.
P.
Vennegues
,
M.
Benaissa
,
B.
Beaumont
,
E.
Feltin
,
P.
De Mierry
,
S.
Dalmosso
,
M.
Leroux
, and
P.
Gibart
,
Appl. Phys. Lett.
77
,
880
(
2000
).
12.
Z.
Liliental-Weber
,
H.
Sohn
,
N.
Newman
, and
J.
Washburn
,
J. Vac. Sci. Technol. B
13
,
1578
(
1995
).
13.
L. T.
Romano
and
T. H.
Myers
,
Appl. Phys. Lett.
71
,
3486
(
1997
).
14.
J. E.
Northrup
,
J.
Neugebauer
, and
L. T.
Romano
,
Phys. Rev. Lett.
77
,
103
(
1996
).
15.
W.
Götz
,
R. S.
Kern
,
C. H.
Chen
,
H.
Liu
,
D. A.
Steigerwald
, and
R. M.
Fletcher
,
Mater. Sci. Eng., B
59
,
211
(
1999
).
16.
J.
Neugebauer
and
C. G.
Van de Walle
,
Phys. Rev. Lett.
75
,
4452
(
1995
), and references therein.
17.
C. G.
Van de Walle
,
Phys. Rev. B
56
,
R10020
(
1997
).
This content is only available via PDF.
You do not currently have access to this content.