We report on an indium–silicon co-doping approach for high-Al-content AlGaN layers. Using this approach, very smooth crack-free n-type AlGaN films as thick as 0.5 μm with Al mole fraction up to 40% were grown over sapphire substrates. The maximum electron concentration in the layers, as determined by Hall measurements, was as high as 8×1017cm−3 and the Hall mobility was up to 40 cm2/Vs. We used this doping technique to demonstrate solar-blind transparent Schottky barrier photodetectors with the cut-off wavelength of 278 nm.

1.
M. A.
Khan
,
J. N.
Kuznia
,
D. T.
Olson
,
M.
Blasinghame
, and
A. R.
Bhattarai
,
Appl. Phys. Lett.
63
,
2455
(
1993
).
2.
M. A.
Khan
,
Q.
Chen
,
C. J.
Sun
,
M. S.
Shur
,
M. F.
Macmillan
,
R. P.
Devaty
, and
J.
Chyke
,
Proc. SPIE
2397
,
283
(
1995
).
3.
A.
Osinsky
,
S.
Gangopadhyay
,
B. W.
Lim
,
M. Z.
Anwar
,
M. A.
Khan
,
D. V.
Kuksenkov
, and
H.
Temkin
,
Appl. Phys. Lett.
72
,
742
(
1998
).
4.
D.
Walker
,
V.
Kumar
,
K.
Mi
,
P.
Sandvik
,
P.
Kung
,
X. H.
Zhang
, and
M.
Razeghi
,
Appl. Phys. Lett.
76
,
403
(
2000
).
5.
S. C.
Jain
,
M.
Willander
,
J.
Narayan
, and
R.
Van Overstraeten
,
Journ. Appl. Phys. V
87
,
965
(
2000
).
6.
G. B.
Parish
,
S.
Keller
,
P.
Kozodoy
,
J. P.
Ibbetson
,
H.
Marchand
,
P. T.
Fini
,
S. B.
Fleischer
,
S. P.
DenBaars
,
U. K.
Mishra
, and
E. J.
Tarsa
,
Appl. Phys. Lett.
75
,
247
(
1999
).
7.
E. J.
Tarsa
,
P.
Kozodoy
,
J.
Ibbetson
, and
B. P.
Keller
,
G.
Parish
, and
U.
Mishra
,
Appl. Phys. Lett.
77
,
316
(
2000
).
8.
T.
Li
,
D. J. H.
Lambert
,
A. L.
Beck
,
C. J.
Collins
,
B.
Yang
,
M. H.
Wong
,
U.
Chowdhury
,
R. D.
Dupuis
, and
J. C.
Campbell
,
Electron. Lett.
36
,
1581
(
2000
).
9.
V.
Adivarahan
,
G.
Simin
,
J. W.
Yang
,
A.
Lunev
,
M. Asif
Khan
,
N.
Pala
,
M.
Shur
, and
R.
Gaska
,
Appl. Phys. Lett.
77
,
863
(
2000
).
10.
G.
Tamulaitis
,
K.
Kazlauskas
,
S.
Juršėnas
,
A.
Žukauskas
,
M. A.
Khan
,
J. W.
Yang
,
J.
Zhang
,
G.
Simin
,
R.
Gaska
, and
M. S.
Shur
,
Appl. Phys. Lett.
77
,
2136
(
2000
).
11.
C.
Stampfl
and
Chris G.
Van de Walle
,
Appl. Phys. Lett.
72
,
459
(
1998
).
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