Two BaxSr1−xO3, films with different contents of Ba (Ba0.25Sr0.75O3 and Ba0.75Sr0.5O3), separated by a MgO film, are used to fabricate planar varactors with low temperature coefficient of capacitance (TCC), high tunability and low losses. The TCC of the varactors are small in the temperature interval between the dielectric permittivity peaks of the Ba0.25Sr0.75O3 and Ba0.75Sr0.5O3 films.

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2001
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