A simple one-dimensional theory is presented to assess the implantation of ions from the ion matrix sheath (IMS) in an ablated plasma plume that is approaching a negatively biased substrate. Under the assumption that the plume geometry, the electron and ion density distributions, and the potential distribution are frozen during the IMS extraction, the implanted ion current is calculated as a function of time for various substrate-plume separations. This model accurately recovers Lieberman’s classic results when the plume front is initially in contact with the substrate.

1.
R. M.
Gilgenbach
,
S.
Kovaleski
,
J. S.
Lash
,
L. K.
Ang
, and
Y. Y.
Lau
,
IEEE Trans. Plasma Sci.
27
,
150
(
1999
).
Google Scholar
 
2.
S.
Kovaleski
,
R. M.
Gilgenbach
,
L. K.
Ang
,
Y. Y.
Lau
, and
J. S.
Lash
,
Appl. Surf. Sci.
127–129
,
947
(
1998
).
Google Scholar
 
3.
R. M.
Gilgenbach
and
P. L. G.
Ventzek
,
Appl. Phys. Lett.
58
,
1597
(
1991
).
Google Scholar
 
4.
J. R.
Conrad
,
J. L.
Radke
,
R. A.
Dodd
,
F. L.
Worzala
, and
N. C.
Tran
,
J. Appl. Phys.
62
,
4591
(
1987
).
Google Scholar
 
5.
M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Material Processing (Wiley, New York, 1994), Chap. 6.4.
6.
M. A.
Lieberman
,
J. Appl. Phys.
66
,
2926
(
1989
).
Google Scholar
 
7.
K.-U.
Riemann
and
Th.
Daube
,
J. Appl. Phys.
86
,
1202
(
1999
).
Google Scholar
 
8.
V.
Vahedi
,
M. A.
Lieberman
,
M. V.
Alves
,
J. P.
Verboncoeur
, and
C. K.
Birdsall
,
J. Appl. Phys.
69
,
2008
(
1991
).
Google Scholar
 
9.
P. K.
Chu
,
S.
Qin
,
C.
Chan
,
N. W.
Cheung
, and
L. A.
Larson
,
Mater. Sci. Eng., R.
17
,
207
(
1996
).
Google Scholar
 
10.
N. W.
Cheung
,
Chem. Phys.
46
,
132
(
1996
);
Google Scholar
 
P. K.
Chu
,
N. W.
Cheung
, and
C.
Chan
,
Semicond. Int.
6
,
165
(
1996
).
Google Scholar
 
11.
D. T. K.
Kwok
,
P. K.
Chu
,
B. P.
Wood
, and
C.
Chan
,
J. Appl. Phys.
86
,
1817
(
1999
).
Google Scholar
 
12.
K.-U.
Riemann
,
J. Phys. D
24
,
493
(
1991
).
Google Scholar
 
13.
N. Hershkowitz, L. Oksuz, A. M. Hala, and M. A. Khedr, IEEE International Conference Plasma Science, Conference Record (New Orleans, LA, 2000), p. 227.
14.
S.
Masamune
and
K.
Yukimura
,
Rev. Sci. Instrum.
71
,
1187
(
2000
).
Google Scholar
 
15.
I. G.
Brown
,
O. R.
Monteiro
, and
M. M. M.
Bilek
,
Appl. Phys. Lett.
74
,
2426
(
1999
).
Google Scholar
 
16.
A.
Anders
,
Appl. Phys. Lett.
76
,
28
(
2000
).
Google Scholar
 
This content is only available via PDF.
© 2001 American Institute of Physics.
2001
American Institute of Physics
You do not currently have access to this content.