Two-dimensional profiles of ultralow-energy B implants in Si after diffusion have been studied in detail by scanning capacitance microscopy in connection with a double beveling technique to enhance depth and lateral resolution. Implants have been made into patterned wafers with different feature sizes ranging from 0.8 to 5 μm. It is demonstrated that the B transient enhanced diffusion is strongly reduced with decreasing feature size below about 2 μm. This effect is related to the increasing effect of interstitial lateral out-diffusion under the SiO2 mask. The implication for the formation of ultrashallow junctions in device structures is discussed.

Topics
Optical devices, Metal oxides, Scanning probe microscopy
1.
A.
Agarwal
,
H.-J.
Gossmann
,
D. C.
Jacobson
,
D. J.
Eaglesham
,
M.
Sosnowski
,
J. M.
Poate
,
I.
Yamada
,
J.
Matsuo
, and
T. E.
Haynes
,
Appl. Phys. Lett.
73
,
2015
(
1998
).
Google Scholar
 
2.
V.
Privitera
,
E.
Napolitani
,
F.
Priolo
,
S.
Moffatt
,
A.
La Magna
,
G.
Mannino
,
A.
Carnera
, and
A.
Picariello
,
Mater. Sci. Semicond. Process.
2
,
35
(
1999
).
Google Scholar
 
3.
M. I.
Current
,
D.
Lopes
,
M. A.
Foad
,
J. G.
England
,
C.
Jones
, and
D.
Su
,
J. Vac. Sci. Technol. B
16
,
327
(
1998
).
Google Scholar
 
4.
E.
Napolitani
,
A.
Carnera
,
E.
Schroer
,
V.
Privitera
,
F.
Priolo
, and
S.
Moffatt
,
Appl. Phys. Lett.
75
,
1869
(
1999
).
Google Scholar
 
5.
V.
Privitera
,
E.
Schroer
,
F.
Priolo
,
E.
Napolitani
, and
A.
Carnera
,
J. Appl. Phys.
88
,
1299
(
2000
).
Google Scholar
 
6.
P.
De Wolf
,
T.
Clarysse
,
W.
Vandervorst
,
L.
Hellemans
,
Ph.
Niedermann
, and
W.
Hänni
,
J. Vac. Sci. Technol. B
16
,
355
(
1998
).
Google Scholar
 
7.
R.
Stephenson
,
A.
Verhulst
,
P.
de Wolf
,
M.
Caymax
, and
W.
Vandervorst
,
Appl. Phys. Lett.
73
,
2597
(
1998
).
Google Scholar
 
8.
F.
Giannazzo
,
F.
Priolo
,
V.
Raineri
, and
V.
Privitera
,
Appl. Phys. Lett.
76
,
2565
(
2000
).
Google Scholar
 
9.
W. L.
Harrington
,
C. W.
Magee
,
M.
Pawlik
,
D. F.
Downey
,
C. M.
Osburn
, and
S. B.
Felch
,
J. Vac. Sci. Technol. B
16
,
286
(
1998
).
Google Scholar
 
10.
J. F. Ziegler, J. P. Biersac, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
11.
M-J.
Caturla
,
T.
Dı́az de la Rubia
, and
L. A.
Marqués
,
Phys. Rev. B
54
,
16683
(
1996
).
Google Scholar
 
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2001
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