We report the growth, epitaxial arrangement, and electrical and magnetic properties of epitaxial thin films of hexagonal BaRuO3 on (001) cubic perovskite substrates. Four-circle x-ray diffraction reveals that the BaRuO3 films are predominantly grown with two distinct orientations normal to the (001) SrTiO3 substrate: (022̄3) of the four-layered hexagonal structure (4H) in the sputter-grown films and (202̄5) of the nine-layered hexagonal structure (9R) in the pulsed laser deposited films. (022̄3)-oriented 4H films consist of four orthogonal domains with the in-plane relationship of BaRuO3[21̄1̄0]//SrTiO3〈110〉. The temperature dependent resistivity of the (022̄3) 4H film shows metallic behavior. In contrast, a resistivity minimum is observed at low temperatures in the (202̄5) 9R film. Both films exhibit Pauli paramagnetism.

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