Epitaxial growth of the first five members of the $Srn+1TinO3n+1$ Ruddlesden–Popper homologous series

The first five members of the $Srn+1TinO3n+1$ Ruddlesden–Popper homologous series, i.e., $Sr2TiO4,$ $Sr3Ti2O7,$ $Sr4Ti3O10,$ $Sr5Ti4O13,$ and $Sr6Ti5O16,$ have been grown by reactive molecular beam epitaxy. A combination of atomic absorption spectroscopy and reflection high-energy electron diffraction intensity oscillations were used for the strict composition control necessary for the synthesis of these phases. X-ray diffraction and high-resolution transmission electron microscope images confirm that these films are epitaxially oriented and nearly free of intergrowths. Dielectric measurements indicate that the dielectric constant tensor coefficient $ε33$ increases from a minimum of $44±4$ in the $n=1(Sr2TiO4)$ film to a maximum of $263±2$ in the $n=∞(SrTiO3)$ film.