Photo-enhanced negative differential resistance (NDR) and photo-accelerated time-dependent dielectric breakdown (TDDB) were observed in thin nitride–oxide (N–O) dielectric film biased with gate negative under tungsten lamp illumination. The photo-induced leakage current and photo-accelerated TDDB show dramatic asymmetry under negative and positive gate bias with constant photo-illumination. Our experiments suggest a unique current conduction mechanism in this nitride thin film. A two-carrier conduction induced positive feedback transport process under negative gate bias, and a two-carrier conduction induced self-limiting transport process under positive gate bias are proposed to qualitatively explain the experimental data. The nitride thin film device possessing a light-enhanced NDR can be employed to develop Si-based optoelectronic devices such as switching and logic control.
Skip Nav Destination
,
,
,
,
Article navigation
21 May 2001
Research Article|
May 21 2001
Photo-enhanced negative differential resistance and photo-accelerated time-dependent dielectric breakdown in thin nitride-oxide dielectric film Available to Purchase
Fen Chen;
Fen Chen
IBM Microeletronics, 1000 River Road, Essex Junction, Vermont 05452
Search for other works by this author on:
Baozhen Li;
Baozhen Li
IBM Microeletronics, 1000 River Road, Essex Junction, Vermont 05452
Search for other works by this author on:
Rajarao Jammy;
Rajarao Jammy
IBM Microeletronics, 1000 River Road, Essex Junction, Vermont 05452
Search for other works by this author on:
Roger A. Dufresne;
Roger A. Dufresne
IBM Microeletronics, 1000 River Road, Essex Junction, Vermont 05452
Search for other works by this author on:
Alvin W. Strong
Alvin W. Strong
IBM Microeletronics, 1000 River Road, Essex Junction, Vermont 05452
Search for other works by this author on:
Fen Chen
Baozhen Li
Rajarao Jammy
Roger A. Dufresne
Alvin W. Strong
IBM Microeletronics, 1000 River Road, Essex Junction, Vermont 05452
Appl. Phys. Lett. 78, 3241–3243 (2001)
Article history
Received:
January 12 2001
Accepted:
March 27 2001
Citation
Fen Chen, Baozhen Li, Rajarao Jammy, Roger A. Dufresne, Alvin W. Strong; Photo-enhanced negative differential resistance and photo-accelerated time-dependent dielectric breakdown in thin nitride-oxide dielectric film. Appl. Phys. Lett. 21 May 2001; 78 (21): 3241–3243. https://doi.org/10.1063/1.1373409
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Attosecond physics and technology
O. Alexander, D. Ayuso, et al.
Significant improvement of breakdown voltage of Al0.86Ga0.14N Schottky barrier diodes by atomic layer etching
Tingang Liu, Zhiyuan Liu, et al.
Roadmap on photonic metasurfaces
Sebastian A. Schulz, Rupert. F. Oulton, et al.
Related Content
A relationship between statistical time to breakdown distributions and pre-breakdown negative differential resistance at nanometric scale
J. Appl. Phys. (July 2014)
Advanced concepts for TDDB reliability in conjunction with 3D stress
AIP Conf. Proc. (June 2014)
Time-dependent electroforming in NiO resistive switching devices
Appl. Phys. Lett. (October 2009)
Electrical characteristics and reliability properties of metal-oxide-semiconductor field-effect transistors with La 2 O 3 gate dielectric
J. Appl. Phys. (October 2006)
Degradation and breakdown characteristics of thin MgO dielectric layers
J. Appl. Phys. (January 2010)