Non-c-axis-oriented ferroelectric SrBi2Ta2O9 (SBT) epitaxial thin films with (103) orientation have been grown by pulsed laser deposition on buffered Si(100) substrates. For the buffer layers, a heterostructure consisting of MgO(111)/YSZ(100)/Si(100) was applied to induce the growth of a (111)-oriented SrRuO3 (SRO) bottom electrode. X-ray diffraction θ–2θ and φ scans revealed well-defined orientation relationships, viz. SBT(103)∥SRO(111)∥MgO(111)∥YSZ(100)∥Si(100); SBT[010]∥SRO[01̄1]∥MgO[01̄1]∥YSZ〈001〉∥Si〈001〉. The ferroelectric measurements of the (103)-oriented SBT films showed a remanent polarization (Pr) of 5.2 μC/cm2 and a coercive field (Ec) of 76 kV/cm for a maximum applied electric field of 440 kV/cm.

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