Light forces are a powerful tool for neutral atom manipulation and have been used previously to focus an atomic beam onto a substrate to create periodic nanostructures. We utilize the material-selective characteristic of the atom–light interaction to structure the material composition of a film during growth. A host and a dopant material are evaporated simultaneously, but only the dopant is focused by the light field. The dopant concentration varies laterally on a sub-100-nm-length scale. This technique can be extended to three-dimensional patterning and opens up ways to engineer the photonic, electronic, or magnetic features of a solid.
REFERENCES
1.
2.
3.
G.
Timp
, R. E.
Behringer
, D. M.
Tennant
, J. E.
Cunningham
, M.
Prentiss
, and K. K.
Berggren
, Phys. Rev. Lett.
69
, 1636
(1992
);J. J.
McClelland
, R. E.
Scholten
, E. C.
Palm
, and R. J.
Celotta
, Science
262
, 877
(1993
).4.
R.
Gupta
, J. J.
McClelland
, Z. J.
Jabbour
, and R. J.
Celotta
, Appl. Phys. Lett.
67
, 1378
(1995
);U.
Drodofsky
, J.
Stuhler
, Th.
Schulze
, M.
Drewsen
, B.
Brezger
, T.
Pfau
, and J.
Mlynek
, Appl. Phys. B: Lasers Opt.
65
, 755
(1997
);B.
Brezger
, Th.
Schulze
, P. O.
Schmidt
, R.
Mertens
, T.
Pfau
, and J.
Mlynek
, Europhys. Lett.
46
, 148
(1999
).5.
A Gaussian laser beam with a waist of 100 μm and a power of 20 mW is used. In the direction along the atomic beam, this Gaussian profile is cut in the center by the substrate.
6.
J. Goldstein, Scanning Electron Microscopy and X-Ray Microanalysis (Plenum, New York, 1992).
7.
C. L. Hedberg, Handbook of Auger Electron Spectroscopy (Physical Electronics, Eden Prairie, MN, 1995).
8.
These measurements have been performed with a high-resolution scanning electron microscope (ABT DS 150F, Topcon, Tokyo) in cooperation with Professor Dr. R. Wurster at the Institut für Physik, Universität Hohenheim.
9.
These measurements have been performed with a high-performance scanning Auger electron spectrometer (Perkin–Elmer F-Sonde 680) by Dr. E. Nold at the Institut für Materialforschung, Forschungszentrum Karlsruhe.
10.
S. Y.
Lin
, J. G.
Fleming
, D. L.
Hetherington
, B. K.
Smith
, R.
Biswas
, K. M.
Ho
, M. M.
Sigalas
, W.
Zubrzycki
, S. R.
Kurtz
, and J.
Bur
, Nature (London)
394
, 251
(1998
).11.
Th.
Schulze
, B.
Brezger
, P. O.
Schmidt
, R.
Mertens
, A. S.
Bell
, T.
Pfau
, and J.
Mlynek
, Microelectron. Eng.
46
, 105
(1999
);Th.
Schulze
, B.
Brezger
, R.
Mertens
, M.
Pivk
, T.
Pfau
, and J.
Mlynek
, Appl. Phys. B: Lasers Opt.
70
, 671
(2000
).12.
J. D.
Joannopoulos
, P. R.
Villeneuve
, and S.
Fan
, Nature (London)
386
, 143
(1997
).13.
S. J.
Rehse
, R. W.
McGowan
, and S. A.
Lee
, Appl. Phys. B: Lasers Opt.
70
, 657
(2000
).
This content is only available via PDF.
© 2001 American Institute of Physics.
2001
American Institute of Physics
You do not currently have access to this content.