Light forces are a powerful tool for neutral atom manipulation and have been used previously to focus an atomic beam onto a substrate to create periodic nanostructures. We utilize the material-selective characteristic of the atom–light interaction to structure the material composition of a film during growth. A host and a dopant material are evaporated simultaneously, but only the dopant is focused by the light field. The dopant concentration varies laterally on a sub-100-nm-length scale. This technique can be extended to three-dimensional patterning and opens up ways to engineer the photonic, electronic, or magnetic features of a solid.
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Research Article| March 19 2001
Structured doping with light forces
M. K. Oberthaler;
Th. Schulze, T. Müther, D. Jürgens, B. Brezger, M. K. Oberthaler, T. Pfau, J. Mlynek; Structured doping with light forces. Appl. Phys. Lett. 19 March 2001; 78 (12): 1781–1783. https://doi.org/10.1063/1.1355664
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