An actuation method for atomic force microscope (AFM) cantilevers in fluids is reported. The radiation pressure generated by a focused acoustic transducer at radio frequency (rf) (100–300 MHz) exerts a localized force of controlled amplitude at a desired location on the AFM cantilever. This force can be used to measure the spring constant and other dynamic properties of the cantilever. Furthermore, by amplitude modulating the rf signal input to the acoustic transducer, the cantilever is actuated in the dc–MHz frequency range. This provides a broadband actuation and characterization method for AFM cantilevers with arbitrary geometry. The technique is demonstrated on AFM cantilevers with spring constants in the 0.01–10 N/m range using a micromachined acoustic transducer/Fresnel lens structure operating at 179 MHz in water.
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12 March 2001
Research Article|
March 12 2001
Actuation and characterization of atomic force microscope cantilevers in fluids by acoustic radiation pressure
F. L. Degertekin;
F. L. Degertekin
G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332
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B. Hadimioglu;
B. Hadimioglu
Xerox Palo Alto Research Center, 3333 Coyote Hill Road, Palo Alto, California 94304
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T. Sulchek;
T. Sulchek
E. L. Ginzton Laboratory, Stanford University, Stanford, California 94305
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C. F. Quate
C. F. Quate
E. L. Ginzton Laboratory, Stanford University, Stanford, California 94305
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Appl. Phys. Lett. 78, 1628–1630 (2001)
Article history
Received:
October 24 2000
Accepted:
January 10 2001
Citation
F. L. Degertekin, B. Hadimioglu, T. Sulchek, C. F. Quate; Actuation and characterization of atomic force microscope cantilevers in fluids by acoustic radiation pressure. Appl. Phys. Lett. 12 March 2001; 78 (11): 1628–1630. https://doi.org/10.1063/1.1354157
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