A double-wire cantilevered glass probe has been produced for scanned probe microthermal, resistivity, and topographic measurements. The structure has many potentially unique properties for scanned probe microscopy and other nanotechnological measurements. In this letter, a double Pt wire probe was fused at the tip and applied to thermal resistive measurements. The probe operation is based on the linear dependence of Pt resistance on temperature. Most microscopic structures are composed of a variety of materials. In the present study, the features of a static random access memory chip are investigated. Such memory chips are composed of materials such as dielectrics, metals, and semiconductors. We demonstrate that these samples, which are prepared using a chemical–mechanical polishing procedure and have essentially no surface topography, can be inspected using the thermal conductivity, resistivity, and topographic sensitivity of these probes.
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25 December 2000
Research Article|
December 25 2000
Investigating material and functional properties of static random access memories using cantilevered glass multiple-wire force-sensing thermal probes
Rimma Dekhter;
Rimma Dekhter
Division of Applied Physics, The Hadassah Laser Center, Department of Ophthalmology and The Neural Computation Center, The Hebrew University of Jerusalem
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Edward Khachatryan;
Edward Khachatryan
Division of Applied Physics, The Hadassah Laser Center, Department of Ophthalmology and The Neural Computation Center, The Hebrew University of Jerusalem
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Yuri Kokotov;
Yuri Kokotov
Division of Applied Physics, The Hadassah Laser Center, Department of Ophthalmology and The Neural Computation Center, The Hebrew University of Jerusalem
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Aaron Lewis;
Aaron Lewis
Division of Applied Physics, The Hadassah Laser Center, Department of Ophthalmology and The Neural Computation Center, The Hebrew University of Jerusalem
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Sophia Kokotov;
Sophia Kokotov
Nanonics Imaging Limited, Jerusalem, Israel
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Galina Fish;
Galina Fish
Nanonics Imaging Limited, Jerusalem, Israel
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Yefim Shambrot;
Yefim Shambrot
Nanonics Imaging Limited, Jerusalem, Israel
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Klony Lieberman
Klony Lieberman
Nanonics Imaging Limited, Jerusalem, Israel
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Rimma Dekhter
Edward Khachatryan
Yuri Kokotov
Aaron Lewis
Sophia Kokotov
Galina Fish
Yefim Shambrot
Klony Lieberman
Division of Applied Physics, The Hadassah Laser Center, Department of Ophthalmology and The Neural Computation Center, The Hebrew University of Jerusalem
Appl. Phys. Lett. 77, 4425–4427 (2000)
Article history
Received:
July 17 2000
Accepted:
October 13 2000
Citation
Rimma Dekhter, Edward Khachatryan, Yuri Kokotov, Aaron Lewis, Sophia Kokotov, Galina Fish, Yefim Shambrot, Klony Lieberman; Investigating material and functional properties of static random access memories using cantilevered glass multiple-wire force-sensing thermal probes. Appl. Phys. Lett. 25 December 2000; 77 (26): 4425–4427. https://doi.org/10.1063/1.1332103
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