We report measurements of the bulk, neutral gas temperature in a chlorine transformer-coupled plasma. A trace amount (2%–5%) of N2 was added to the discharge and the rotational temperature of the C3Πu state was determined from the C3Πu→B3Πg emission in the ultraviolet. This temperature has been shown by others to be equal to the rotational temperature of ground-state N2, which is the thermally equilibrated (translational and rotational) gas temperature (Tg). The gas temperature 3 cm above the wafer is equal to, or only slightly above the wall temperature (300 K) throughout the low-power, capacitively coupled regime (<60 W, 0.024 W/cm3). Between the lowest (130 W, 0.053 W/cm3) and highest (900 W, 0.36 W/cm3) inductively coupled mode powers investigated, Tg increases sublinearly with power (and electron density). The high-power (900 W) Tg increases with increasing pressure (650, 750, 900, and 1250 K at 2, 5, 10, and 20 mTorr, respectively). Mechanisms of neutral gas heating are discussed. The energy released in dissociation of Cl2 appears to be the dominant heating mechanism.

Topics
Electron density, Chemical elements, Inductively coupled plasma, Plasma diagnostics
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