We present a simple shadow mask method to fabricate electrodes with nanometer scale separation. Metal wires with gaps are made by incorporating multiwall carbon nanotubes or single-wall carbon nanotube (SWNT) bundles into a trilayer electron beam lithography process. The simple, highly controllable, and scaleable method has been used to make gaps with widths between 20 and 100 nm and may be extended to gap sizes of 1 nm. We report electron transport measurements of individual SWNTs bridging nanogaps with electrode spacings of approximately 20 nm. Metallic SWNTs exhibit quantum dot behavior with an 80 meV charging energy and a 20 meV energy level splitting. We observe a strong field effect behavior in short semiconducting SWNT segments, evidence for diffusive electron transport in these samples.
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19 June 2000
Research Article|
June 19 2000
Fabrication of nanometer size gaps in a metallic wire
J. Lefebvre;
J. Lefebvre
Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, Pennsylvania, 19104
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M. Radosavljević;
M. Radosavljević
Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, Pennsylvania, 19104
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A. T. Johnson
A. T. Johnson
Department of Physics and Astronomy, University of Pennsylvania, Philadelphia, Pennsylvania, 19104
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Appl. Phys. Lett. 76, 3828–3830 (2000)
Article history
Received:
October 27 1999
Accepted:
April 28 2000
Citation
J. Lefebvre, M. Radosavljević, A. T. Johnson; Fabrication of nanometer size gaps in a metallic wire. Appl. Phys. Lett. 19 June 2000; 76 (25): 3828–3830. https://doi.org/10.1063/1.126795
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