Epitaxial thin films have been grown with a (103) orientation on (111) substrates by pulsed-laser deposition. Four-circle x-ray diffraction and transmission electron microscopy reveal nearly phase-pure epitaxial films. Epitaxial (111) electrodes enabled the electrical properties of these (103)-oriented films to be measured. The low-field relative permittivity was 185, the remanent polarization was 15.7 and the dielectric loss was 2.5% for a 0.5-μm-thick film.
REFERENCES
1.
2.
J.
Lettieri
, Y.
Jia
, M.
Urbanik
, C. I.
Weber
, J.-P.
Maria
, D. G.
Schlom
, H.
Li
, R.
Ramesh
, R.
Uecker
, and P.
Reiche
, Appl. Phys. Lett.
73
, 2923
(1998
).3.
J. Lettieri, M. A. Zurbuchen, G. W. Brown, Y. Jia, W. Tian, X. Q. Pan, M. E. Hawley, and D. G. Schlom, in Multicomponent Oxide Films for Electronics, edited by M. E. Hawley, D. H. A. Blank, C. B. Eom, D. G. Schlom, and S. K. Streiffer (Materials Research Society, Pittsburgh, PA, 1999), Vol. 574, pp. 31–36.
4.
Q. D.
Jiang
, Z. J.
Huang
, P.
Jin
, C. L.
Chen
, A.
Brazdeikis
, Y. Y.
Sun
, H. H.
Feng
, A.
Benneker
, and C. W.
Chu
, Surf. Sci. Lett.
405
, L554
(1998
).5.
6.
J. Lettieri, Y. Jia, M. Urbanik, C. I. Weber, J.-P. Maria, R. Uecker, P. Reiche, and D. G. Schlom, presented at the 10th International Symposium on Integrated Ferroelectrics, Monterey, CA, 1998 (unpublished).
7.
S. J.
Hyun
, B. H.
Park
, S. D.
Bu
, J. H.
Jung
, and T. W.
Noh
, Appl. Phys. Lett.
73
, 2518
(1998
).8.
9.
T.
Terashima
, Y.
Bando
, K.
Iijima
, K.
Yamamoto
, and K.
Hirata
, Appl. Phys. Lett.
53
, 2232
(1988
).10.
J.
Fujita
, T.
Yoshitake
, A.
Kamijo
, T.
Satoh
, and H.
Igarashi
, J. Appl. Phys.
64
, 1292
(1988
).11.
J. Lettieri, Y. Jia, S. Fulk, D. G. Schlom, M. E. Hawley, and G. W. Brown, Thin Solid Films (submitted).
12.
S. E.
Moon
, T. K.
Song
, S. B.
Back
, S.-I.
Kwun
, J.-G.
Yoon
, and J. S.
Lee
, Appl. Phys. Lett.
75
, 2827
(1999
).13.
is orthorhombic with space group and lattice constants a=5.5094 Å, b=5.5094 Å, and c=25.098 Å at room temperature as determined by
A. D.
Rae
, J. G.
Thompson
, R. L.
Withers
, and A. C.
Willis
, Acta Crystallogr., Sect. B: Struct. Sci.
B46
, 474
(1990
).14.
J.
Kwo
, R. M.
Fleming
, H. L.
Kao
, D. J.
Werder
, and C. H.
Chen
, Appl. Phys. Lett.
60
, 1905
(1992
).15.
C. B.
Eom
, A. F.
Marshall
, Y.
Suzuki
, R.
Boyer
, R. F.
Pease
, and T. H.
Geballe
, Nature (London)
353
, 544
(1991
).16.
K.
Kuroda
, O.
Wada
, J.
Tanimura
, K.
Kojima
, T.
Takami
, M.
Kataoka
, T.
Ogama
, and K.
Hamanaka
, Jpn. J. Appl. Phys., Part 2
30
, L582
(1991
).17.
J. Lettieri, M. A. Zurbuchen, G. W. Brown, Y. Jia, W. Tian, X. Q. Pan, M. E. Hawley, and D. G. Schlom, presented at the Spring 1999 Materials Research Society Meeting, San Francisco, CA, 1999 (unpublished).
18.
T.
Nagahama
, T.
Manabe
, I.
Yamaguchi
, T.
Kumagai
, T.
Tsuchiya
, and S.
Mizuta
, Thin Solid Films
353
, 52
(1999
).19.
Numerical Data and Functional Relationships in Science and Technology, Landolt-Börnstein Series, edited by K.-H. Hellwege and A. M. Hellwege (Springer, Berlin, 1976), New Series, Group III, Vol. 7, Part e, pp. 134–135; (Springer, Berlin, 1977), Vol. 7, Part f, p. 743; (Springer, Berlin, 1981), Vol. 16, Part a, p. 233.
20.
21.
J. C.
Clark
, J.-P.
Maria
, K. J.
Hubbard
, and D. G.
Schlom
, Rev. Sci. Instrum.
68
, 2538
(1997
).22.
is orthorhombic with space group Pbnm and lattice constants a=5.53 Å, b=5.57 Å, and c=7.85 Å at room temperature (see Ref. 19). The lattice can be considered as a pseudocubic perovskite with a≈3.92 Å resulting in a −0.5% lattice mismatch with at room temperature. We use pseudocubic indexing throughout this manuscript for .
23.
C. B.
Eom
, R. J.
Cava
, R. M.
Fleming
, J. M.
Phillips
, R. B.
van Dover
, J. H.
Marshall
, J. W. P.
Hsu
, J. J.
Krajewski
, and W. F.
Peck
, Jr., Science
258
, 1766
(1992
).24.
25.
The narrowest FWHMs observed were 0.23° in 2θ and 0.62° in ω for the 206 peak of for films grown on (111) electrodes on (111) .
26.
We observe OPBs in all of our epitaxial and films grown by PLD on (001), (110), and (111) substrates, both with and without electrodes, and also on (110) substrates.
27.
M. A. Zurbuchen, J. Lettieri, Y. Jia, and D. G. Schlom, J. Mater. Res. (submitted).
28.
K.
Watanabe
, M.
Tanaka
, E.
Sumitomo
, K.
Katori
, H.
Yagi
, and J. F.
Scott
, Appl. Phys. Lett.
73
, 126
(1998
).
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