The interface of direct bonded GaAs to GaAs has been studied by scanning transmission electron microscopy and electron energy loss spectroscopy. Voids are seen along the boundary with most being partially filled with a gallium particle. Two general sizes of voids are seen. The large voids (d∼45 nm) are distributed in an approximately linear relationship and the smaller (d∼12 nm) randomly. In compliant substrates, one of the layers is made thin (⩽10 nm) and twisted ∼45°. The larger voids often extend past this thin compliant layer, but no evidence of granularity of the epitaxial film is observed.

1.
P.
Kopperschmidt
,
G.
Kastner
,
St.
Senz
,
D.
Hesse
, and
U.
Gosele
,
Appl. Phys. A: Solids Surf.
64
,
533
(
1997
).
2.
G.
Patriarche
,
F.
Jeannes
,
J.-L.
Oudar
, and
F.
Glas
,
J. Appl. Phys.
82
,
4892
(
1997
).
3.
Z. H.
Zhu
,
R.
Zhou
,
F. E.
Ejeckam
,
Z.
Zhang
,
J.
Zhang
,
J.
Greenberg
,
Y. H.
Lo
,
H. Q.
Hou
, and
B. E.
Hammons
,
Appl. Phys. Lett.
72
,
2598
(
1998
).
4.
P.
Kopperschmidt
,
S.
Senz
,
G.
Kastner
,
D.
Hesse
, and
U.
Gosele
,
Appl. Phys. Lett.
72
,
3181
(
1998
).
5.
F. E.
Ejeckam
,
Y. H.
Lo
, and
S.
Subramanian
,
Appl. Phys. Lett.
70
,
1685
(
1997
).
6.
F. E.
Ejeckam
,
M. L.
Seaford
,
Y. H.
Lo
,
H. Q.
Hou
, and
B. E.
Hammons
,
Appl. Phys. Lett.
71
,
776
(
1997
).
7.
P.
Kopperschmidt
,
St.
Senz
,
R.
Scholz
, and
U.
Gosele
,
Appl. Phys. Lett.
74
,
374
(
1999
).
8.
S. J. Klepeis, J. P. Benedict, and R. M. Anderson, Specimen Preparation for Transmission Electron Microscopy (Materials Research Society, Pittsburgh, PA, 1988), p. 179.
9.
S. Hillyard, Ph.D. Thesis, Cornell University, 1996.
10.
A. V. Crewe, J. P. Langmore, and M. S. Isaacson, Physical Aspects of Electron Microscopy and Microbeam Analysis, edited by B. M. Siegel and D. K. Beaman (Wiley, New York, 1975), p. 47.
11.
S. J.
Pennycook
and
D. E.
Jesson
,
Ultramicroscopy
37
,
14
(
1991
).
12.
R. F.
Loane
,
P.
Xu
, and
J.
Silcox
,
Ultramicroscopy
40
,
121
(
1992
).
13.
R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope (Plenum, New York, 1986).
This content is only available via PDF.
You do not currently have access to this content.