Positronium annihilation lifetime spectroscopy is used to determine the pore-size distribution in low-dielectric thin films of mesoporous methylsilsesquioxane. A physical model of positronium trapping and annihilating in isolated pores is presented. The systematic dependence of the deduced pore-size distribution on pore shape/dimensionality and sample temperature is predicted using a simple quantum mechanical calculation of positronium annihilation in a rectangular pore. A comparison with an electron microscope image is presented.

1.
W. L.
Wu
,
W. E.
Wallace
,
E. K.
Lin
,
G. W.
Lynn
,
C. J.
Glinka
,
E. T.
Ryan
, and
H.-M.
Ho
,
J. Appl. Phys.
87
,
1193
(
2000
).
2.
D. W.
Gidley
,
W. E.
Frieze
,
A. F.
Yee
,
T. L.
Dull
,
E. T.
Ryan
, and
H.-M.
Ho
,
Phys. Rev. B
60
,
R5157
(
1999
).
3.
M. P.
Petkov
,
M. H.
Weber
,
K. G.
Lynn
,
K. P.
Rodbell
, and
S. A.
Cohen
,
J. Appl. Phys.
86
,
3104
(
1999
).
4.
C. V.
Nguyen
,
K. R.
Carter
,
C. J.
Hawker
,
J. L.
Hedrick
,
R. L.
Jaffe
,
R. D.
Miller
,
J. F.
Remenar
,
H.-W.
Rhee
,
P. M.
Rice
,
M. F.
Toney
,
M.
Trollsas
, and
D. Y.
Yoon
,
Chem. Mater.
11
,
3080
(
1999
).
5.
L.
Xie
,
G. B.
DeMaggio
,
W. E.
Frieze
,
J.
DeVries
,
D. W.
Gidley
,
H. A.
Hristov
, and
A. F.
Yee
,
Phys. Rev. Lett.
74
,
4947
(
1995
).
6.
G. B.
DeMaggio
,
W. E.
Frieze
,
D. W.
Gidley
,
M.
Zhu
,
H. A.
Hristov
, and
A. F.
Yee
,
Phys. Rev. Lett.
78
,
1524
(
1997
).
7.
S. W.
Provencher
,
Comput. Phys. Commun.
27
,
213
(
1982
).
8.
R. B.
Gregory
,
J. Appl. Phys.
70
,
4665
(
1991
).
9.
S.
Dannefaer
,
D.
Kerr
,
D.
Craigen
,
T.
Bretagnon
,
T.
Taliercio
, and
A.
Foucaran
,
J. Appl. Phys.
79
,
9110
(
1996
).
10.
G.
Dlubek
,
C.
Hubner
, and
S.
Eichler
,
Nucl. Instrum. Methods Phys. Res. B
142
,
191
(
1998
).
11.
H.
Saito
and
T.
Hyodo
,
Phys. Rev. B
60
,
11070
(
1999
).
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