The patterning process of heterostructure waveguides was examined for fabricating micro-optics, including channels and lenses. After the patterning of the amorphous thin films derived from spin-cast methoxyethoxide precursors by a wet etching, the patterned amorphous film was crystallized by solid-phase epitaxy. A 5-μm-wide ridge-type channel waveguide was fabricated in a heterostructure on a (100) substrate by the process. The optical confinement was successfully observed. A mode index lens was also fabricated in the heterostructure on the (100) substrate. A deflection of the collimated light by the lens was observed.
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© 1999 American Institute of Physics.
1999
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