Using cathodic arc deposition with 700 eV nitrogen ion assistance, metallic response in thin films to at least is found. Metallic behavior is usually limited to N/Ti ratios just above 1.1. Defects are almost exclusively Ti vacancies which further enhances optical changes. The resulting large shift in onset of Drude reflection to longer wavelengths enhances the view, daylighting, and environmental performance of a coated window relative to stoichiometric TiN films on glass.
REFERENCES
1.
A.
Bendavid
, P. J.
Martin
, R. P.
Netterfield
, and T. J.
Kinder
, Surf. Interface Anal.
24
, 627
(1996
).2.
P. E.
Schmid
, M. S.
Sunaga
, and F.
Levy
, J. Vac. Sci. Technol. A
16
, 2870
(1998
).3.
G.
Pavelescu
, M.
Branc
, V.
Braic
, L.
Melinte
, and D.
Melinte
, Opt. Eng.
35
, 1339
(1996
).4.
A. J.
Perry
, M.
Georgson
, and W. D.
Sproull
, Thin Solid Films
157
, 255
(1988
).5.
G. K.
Hubler
, D.
Van Vechten
, E. P.
Donovan
, and R. A.
Kant
, Mater. Res. Soc. Symp. Proc.
128
, 5
(1989
).6.
7.
E.
Valkonen
, C-G
Ribbing
, and J-E
Sundgren
, Appl. Opt.
25
, 3624
(1986
).8.
B.
Karlsson
, J. K.
Sundgren
, and B-O
Johansson
, Thin Solid Films
87
, 181
(1981
).
This content is only available via PDF.
© 1999 American Institute of Physics.
1999
American Institute of Physics
You do not currently have access to this content.
