Lattice-matched (Δa/a=0.09%) ScAlMgO4(0001) substrates were employed to grow single crystalline quality ZnO films by laser molecular-beam epitaxy. Extremely smooth surface represented by atomically flat terraces and half unit cell (0.26 nm) high steps and extremely small orientation fluctuations both in-plane (<0.02°) and out-of-plane (<0.01°) are achieved. The films have high mobility (∼100 cm2/V s) together with low residual carrier concentration (∼1015cm−3). Excellent optical properties, including a clear doublet of A and B exciton peaks in absorption spectra, were also observed. These features could not be simultaneously achieved for ZnO films grown on sapphire(0001) having a large lattice mismatch (Δa/a=18%).

1.
See, for example,
M.
Kawasaki
,
A.
Ohtomo
,
I.
Ohkubo
,
H.
Koinuma
,
Z. K.
Tang
,
P.
Yu
,
G. K. L.
Wong
,
B. P.
Zhang
, and
Y.
Segawa
,
Mater. Sci. Eng., B
56
,
239
(
1998
).
2.
A.
Ohtomo
,
M.
Kawasaki
,
T.
Koida
,
K.
Masubuchi
,
H.
Koinuma
,
Y.
Sakurai
,
Y.
Yoshida
,
T.
Yasuda
, and
Y.
Segawa
,
Appl. Phys. Lett.
72
,
2466
(
1998
).
3.
A.
Ohtomo
,
M.
Kawasaki
,
Y.
Sakurai
,
I.
Ohkubo
,
R.
Shiroki
,
Y.
Yoshida
,
T.
Yasuda
,
Y.
Segawa
, and
H.
Koinuma
,
J. Mater. Sci. Eng. B
56
,
263
(
1998
).
4.
A.
Ohtomo
,
M.
Kawasaki
,
I.
Ohkubo
,
H.
Koinuma
,
T.
Yasuda
, and
Y.
Segawa
,
Appl. Phys. Lett.
75
,
980
(
1999
).
5.
K. J.
Hagemark
and
L. C.
Chacka
,
J. Solid State Chem.
15
,
261
(
1975
).
6.
Accurate lattice constants of ScAlMgO4 measured in this study were a=3.249 Å and c=25.195 Å. Other values of a=3.2405 Å and c=25.106 Å, and a=3.236 Å and c=25.150 Å are reported in Ref. 7;
N.
Kimizuka
and
T.
Mohri
,
J. Solid State Chem.
78
,
98
(
1989
), respectively.
7.
E. S.
Hellman
,
C. D.
Brandle
,
L. F.
Schneemeyer
,
D.
Wiesmann
,
I.
Brener
,
T.
Siegrist
,
G. W.
Berkstresser
,
D. N. E.
Buchanan
, and
E. H.
Hartford
, Jr.
,
Mater. Res. Soc. Symp. Proc.
395
,
51
(
1996
).
8.
H.
Koinuma
,
M.
Kawasaki
, and
M.
Yoshimoto
,
Mater. Res. Soc. Symp. Proc.
474
,
303
(
1997
).
9.
M.
Kawasaki
,
K.
Takahashi
,
T.
Maeda
,
R.
Tsuchiya
,
M.
Shinohara
,
O.
Ishiyama
,
T.
Yonezawa
,
M.
Yoshimoto
, and
H.
Koinuma
,
Science
266
,
1540
(
1994
).
10.
R. D.
Vispute
,
V.
Talyansky
,
Z.
Trajanovic
,
S.
Choopun
,
M.
Downes
,
R. P.
Sharma
,
T.
Venkatesan
,
M. C.
Woods
,
R. T.
Lareau
,
and
K. A.
Jones
, and
A. A.
Iliadis
,
Appl. Phys. Lett.
70
,
2735
(
1997
).
11.
A. Ohtomo, H. Kimura, K. Saito, T. Makino, Y. Segawa, H. Koinuma, and M. Kawasaki, J. Cryst. Growth (to be published).
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