High resolution electron microscopy has been used to determine the atomic structure of the stacking fault which easily folds from prismatic to basal plane in wurtzite (Al, Ga)N epitaxial layers. This letter reports experimental evidence for a simultaneous occurrence of two atomic configurations for the stacking fault. In more than 90% of the cases, it takes the atomic structure of the stacking fault; and in very few nanometric areas, it exhibits a stacking fault atomic configuration.
REFERENCES
1.
S.
Nakamura
, M.
Senoh
, S.
Nagahama
, N.
Iwasa
, T.
Yamada
, T.
Mitsushita
, H.
Kiyoku
, and Y.
Sugimoto
, Jpn. J. Appl. Phys., Part 2
35
, L74
(1996
).2.
H.
Morkoç
, S.
Strite
, G. B.
Gao
, M. E.
Lin
, B.
Sverdlov
, and M.
Burns
, J. Appl. Phys.
76
, 1363
(1994
).3.
F. A.
Ponce
, D. P.
Bour
, W.
Götz
, N. M.
Johnson
, H. I.
Helava
, I.
Grzegory
, J.
Jun
, and S.
Porowski
, Appl. Phys. Lett.
68
, 917
(1995
).4.
P.
Vermaut
, P.
Ruterana
, G.
Nouet
, A.
Salvador
, and H.
Morkoç
, Inst. Phys. Conf. Ser.
146
, 289
(1995
).5.
S.
Tanaka
, R. S.
Kern
, and R. F.
Davis
, Appl. Phys. Lett.
66
, 37
(1995
).6.
D. J.
Smith
, D.
Chandrasekar
, B.
Sverdlov
, A.
Botchkarev
, A.
Salvador
, and H.
Morkoç
, Appl. Phys. Lett.
67
, 1803
(1995
).7.
B. N.
Sverdlov
, G. A.
Martin
, H.
Morkoç
, and D. J.
Smith
, Appl. Phys. Lett.
67
, 2063
(1995
).8.
J. L.
Rouvière
, M.
Arlery
, R.
Niebuhr
, and K.
Bachem
, Inst. Phys. Conf. Ser.
146
, 285
(1995
).9.
P.
Vermaut
, P.
Ruterana
, and G.
Nouet
, Philos. Mag. A
76
, 1215
(1997
).10.
P.
Ruterana
, P.
Vermaut
, G.
Nouet
, A.
Botchkarev
, A.
Salvador
, and H.
Morkoç
, Mater. Sci. Eng., B
50
, 72
(1998
).11.
V.
Potin
, P.
Ruterana
, and G.
Nouet
, J. Electron. Mater.
27
, 266
(1998
).12.
13.
P.
Vermaut
, P.
Ruterana
, G.
Nouet
, A.
Salvador
, and H.
Morkoç
, Mater. Res. Soc. Symp. Proc.
423
, 551
(1996
).14.
P.
Vermaut
, P.
Ruterana
, G.
Nouet
, A.
Salvador
, and H.
Morkoç
, Philos. Mag. A
75
, 239
(1997
).15.
P. Vermaut, Ph.D. dissertation, Université de Caen, 1997.
16.
P.
Vermaut
, P.
Ruterana
, G.
Nouet
, A.
Salvador
, and H.
Morkoç
, Mater. Res. Soc. Internet Journal of Nitride Semiconductor Research
1
, 42
(1996
).17.
P.
Ruterana
, P.
Vermaut
, G.
Nouet
, A.
Salvador
, and H.
Morkoç
, Mater. Res. Soc. Internet Journal of Nitride Semiconductor Research.
2
, 42
(1997
).18.
19.
H.
Blank
, P.
Delavignette
, R.
Gevers
, and S.
Amelinckx
, Phys. Status Solidi
7
, 747
(1964
).20.
This content is only available via PDF.
© 1999 American Institute of Physics.
1999
American Institute of Physics
You do not currently have access to this content.