We present a structural investigation of buried C-induced Ge quantum dot multilayers grown on (001) Si by molecular-beam epitaxy. Using grazing-incidence small angle x-ray scattering, we determine the shape, the mean radius, height, and dot distance. The dot distribution is isotropic within the (001) interfaces, and no correlation of the dot positions along growth direction was found.
REFERENCES
1.
O. G.
Schmidt
, C.
Lange
, K.
Eberl
, O.
Kienzle
, and F.
Ernst
, Appl. Phys. Lett.
71
, 2340
(1997
).2.
K.
Eberl
, O. G.
Schmidt
, S.
Schieker
, N. Y.
Jin-Philipp
, and F.
Philipp
, Solid-State Electron.
42
, 1593
(1998
).3.
O. G.
Schmidt
, K.
Eberl
, S.
Schieker
, N. Y.
Jin-Phillipp
, F.
Phillipp
, J.
Auerswald
, and P.
Lamperter
, Appl. Phys. Lett.
72
, 3344
(1998
).4.
O. G.
Schmidt
, S.
Schieker
, K.
Eberl
, O.
Kienzle
, and F.
Ernst
, Appl. Phys. Lett.
73
, 659
(1998
).5.
O.
Leifeld
, D.
Grützmacher
, B.
Müller
, and K.
Kern
, Mater. Res. Soc. Symp. Proc.
533
, 163
(1998
).6.
A. A.
Darhuber
, P.
Schittenhelm
, V.
Holý
, J.
Stangl
, G.
Bauer
, and G.
Abstreiter
, Phys. Rev. B
55
, 15652
(1997
).7.
M.
Schmidbauer
, Th.
Wiebach
, H.
Raidt
, M.
Hanke
, R.
Koehler
, and H.
Wawra
, Phys. Rev. B
58
, 10523
(1998
).8.
A. Guinier, X-Ray Diffraction (Freeman, San Francisco, 1968).
9.
B. E. Warren, X-Ray Diffraction (Addison Wesley, Reading, MA, 1969).
10.
This content is only available via PDF.
© 1999 American Institute of Physics.
1999
American Institute of Physics
You do not currently have access to this content.
