Crystalline silicon nanoparticles (quantum dots) with diameters around 4 nm are produced via -laser-induced decomposition of in a flow reactor and subsequently transferred into a freely propagating cluster beam. Thin structured films are then obtained by shaping the beam with a mask and depositing the nanoclusters at low energy on a sapphire substrate. Upon illumination with ultraviolet radiation, the nanoparticles exhibit strong photoluminescence in the red.
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