(PZT) thin-film optical waveguides were grown on Nb-doped substrates by solid-phase epitaxy to fabricate an electrode/waveguide/conductor structure. The propagation loss was relatively large for a PZT waveguide on a lightly Nb-doped as compared with the propagation loss of 4 dB/cm for the structure using undoped An electro-optic beam deflection device was fabricated by preparing a prism electrode on the surface of the PZT waveguide on a lightly Nb-doped substrate. Efficient deflection of the coupled laser beam in the PZT waveguide as large as 11 mrad was observed by applying 35 V between the prism electrode and the substrate.
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1998
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