Pulsed-laser deposited (PLD) polytetrafluoroethylene (Teflon-PTFE) films from press-sintered powder targets are found to be highly crystalline, with spherulite sizes adjustable over more than one order of magnitude by suitable thermal annealing. Films with large spherulites show an excellent charge stability, comparable and even superior to commercially available Teflon-PTFE foils. PLD-PTFE enlarges the family of Teflon materials and may thus become interesting for potential miniaturized electret devices.

1.
C. R. Davis and F. D. Egitto, CHEMTECHMarch (1995).
2.
R.
Kressman
,
G. M.
Sessler
, and
P.
Günter
,
IEEE Trans. Dielectr. Electr. Insul.
3
,
607
(
1996
).
3.
S. G.
Hansen
and
T. E.
Robitaille
,
Appl. Phys. Lett.
52
,
81
(
1988
).
4.
C. W.
Reedyk
,
IEEE Trans. Audio Electroacoust.
AU-19
,
1
(
1971
).
5.
J. A.
Voorthuyzen
,
A. J.
Sprenkels
,
W.
Olthuis
, and
P.
Bergveld
,
IEEE Trans. Electr. Insul.
24
,
255
(
1989
).
6.
D. T.
Morrison
and
T.
Robertson
,
Thin Solid Films
15
,
87
(
1973
).
7.
F.
Quaranta
,
A.
Valentini
,
P.
Faria
,
R.
Lamendola
, and
R.
d’Agostino
,
Appl. Phys. Lett.
63
,
10
(
1993
).
8.
W.
De Wilde
,
Thin Solid Films
24
,
101
(
1974
).
9.
H.
Usui
,
H.
Koshikawa
, and
K.
Tanaka
,
J. Vac. Sci. Technol. A
13
,
2318
(
1995
).
10.
R. d’Agostino, F. Cramarossa, F. Fracassi, and F. Iluzzi, Plasma Deposition, Treatment and Etching of Polymers, edited by R. d’Agostino (Academic Press, New York, 1990), Chap. 2.
11.
S. J.
Limb
,
C. B.
Labelle
,
K. K.
Gleason
,
D. J.
Edell
, and
E. F.
Gleason
,
Appl. Phys. Lett.
68
,
2810
(
1996
).
12.
J. M.
Tibbitt
,
A. T.
Bell
, and
M.
Shen
,
J. Macromol. Sci. Chem.
10
,
519
(
1976
).
13.
U.
Hetzler
and
E.
Kay
,
J. Appl. Phys.
49
,
5617
(
1978
).
14.
N.
Amyot
,
J. E.
Klemberg-Sapieha
,
M. R.
Wertheimer
,
Y.
Segui
, and
M.
Moisan
,
IEEE Trans. Electr. Insul.
27
,
1101
(
1992
).
15.
D. Bäuerle, Laser Processing and Chemistry (Springer, Berlin, 1996).
16.
G. B.
Blanchet
,
C. R.
Fincher
, Jr.,
C. L.
Jackson
,
S. I.
Shah
, and
K. H.
Gardner
,
Science
262
,
719
(
1993
).
17.
W.
Jiang
,
M. G.
Norton
,
L.
Tsung
, and
J. T.
Dickinson
,
J. Mater. Res.
10
,
1038
(
1995
).
18.
R. Schwödiauer, J. Heitz, E. Arenholz, S. Bauer-Gogonea, S. Bauer, and W. Wirges (unpublished).
19.
S. T.
Li
,
E.
Arenholz
,
J.
Heitz
, and
D.
Bäuerle
,
Appl. Surf. Sci.
125
,
17
(
1998
).
20.
G. M.
Sessler
and
J. E.
West
,
J. Appl. Phys.
43
,
922
(
1972
).
21.
V. V. Kochervinskij, N. N. Kuzmina, and I. M. Sokolova, Proceedings of the 7th International Symposium on Electrets, ISE7, 117 (1991).
22.
H.
von Seggern
,
J. Appl. Phys.
50
,
7039
(
1979
).
23.
S. S.
Bamji
,
K. J.
Kao
, and
M. M.
Perlman
,
J. Electrost.
6
,
373
(
1979
).
24.
H.
von Seggern
and
J. E.
West
,
J. Appl. Phys.
55
,
2754
(
1984
).
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