The dynamics of electron beam ablation plumes have been characterized through the application of dye laser resonance absorption photography. The ablation of fused silica by a channelspark electron beam was studied by probing the near-ground state, neutral Si transition at 288.158 nm. Necessary background gases (Ar or were tested at pressures of 15 or 30 mTorr. A two-lobed, Si atom plume shape was discovered that is hydrodynamically more complex than laser ablation plumes. These plumes merge into a single-lobed plume at about 400 ns after the e-beam current pulse rise. Plume front expansion velocities of Si atoms were measured at nearly 1 cm/μs, and are comparable to the expansion of laser ablated metal atom plumes with laser fluences of a few J/cm2.
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2 November 1998
Research Article|
November 02 1998
Dynamics of electron beam ablation of silicon dioxide measured by dye laser resonance absorption photography
S. D. Kovaleski;
S. D. Kovaleski
Intense Energy Beam Interaction Laboratory, Department of Nuclear Engineering and Radiological Sciences, The University of Michigan, Ann Arbor, Michigan 48109-2104
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R. M. Gilgenbach;
R. M. Gilgenbach
Intense Energy Beam Interaction Laboratory, Department of Nuclear Engineering and Radiological Sciences, The University of Michigan, Ann Arbor, Michigan 48109-2104
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L. K. Ang;
L. K. Ang
Intense Energy Beam Interaction Laboratory, Department of Nuclear Engineering and Radiological Sciences, The University of Michigan, Ann Arbor, Michigan 48109-2104
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Y. Y. Lau
Y. Y. Lau
Intense Energy Beam Interaction Laboratory, Department of Nuclear Engineering and Radiological Sciences, The University of Michigan, Ann Arbor, Michigan 48109-2104
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Appl. Phys. Lett. 73, 2576–2578 (1998)
Article history
Received:
July 16 1998
Accepted:
September 03 1998
Citation
S. D. Kovaleski, R. M. Gilgenbach, L. K. Ang, Y. Y. Lau; Dynamics of electron beam ablation of silicon dioxide measured by dye laser resonance absorption photography. Appl. Phys. Lett. 2 November 1998; 73 (18): 2576–2578. https://doi.org/10.1063/1.122510
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