Precursor chemistry and ultrahigh-vacuum chemical vapor deposition have been used to deposit thin films on (001) Si substrates. Films with carbon compositions ranging up to 20 at. % were deposited at substrate temperatures of 600–740 °C using gas mixtures of with or which are (C–H)-free precursors incorporating tetrahedra. The composition of the resulting materials was obtained by Rutherford backscattering spectrometry, including carbon resonance analysis. Cross-sectional transmission electron microscopy and infrared spectroscopy were used to provide microstructural and bonding information. Raman spectroscopy suggested that the substitutional C concentration obtained using this protocol was higher than that obtained by other methods. The addition of small amounts of to the gas mixture had a remarkable effect on growth rates and film crystallinity.
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27 April 1998
Research Article|
April 27 1998
Strategies for the synthesis of highly concentrated diamond-structured systems
D. Chandrasekhar;
D. Chandrasekhar
Center for Solid State Science, Arizona State University, Tempe, Arizona 85287-1704
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J. McMurran;
J. McMurran
Center for Solid State Science, Arizona State University, Tempe, Arizona 85287-1704
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David J. Smith;
David J. Smith
Center for Solid State Science, Arizona State University, Tempe, Arizona 85287-1704
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J. Kouvetakis;
J. Kouvetakis
Center for Solid State Science, Arizona State University, Tempe, Arizona 85287-1704
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J. D. Lorentzen;
J. D. Lorentzen
Department of Physics and Astronomy, Arizona State University, Tempe, Arizona 85287-1504
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J. Menéndez
J. Menéndez
Department of Physics and Astronomy, Arizona State University, Tempe, Arizona 85287-1504
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Appl. Phys. Lett. 72, 2117–2119 (1998)
Article history
Received:
December 23 1997
Accepted:
February 24 1998
Citation
D. Chandrasekhar, J. McMurran, David J. Smith, J. Kouvetakis, J. D. Lorentzen, J. Menéndez; Strategies for the synthesis of highly concentrated diamond-structured systems. Appl. Phys. Lett. 27 April 1998; 72 (17): 2117–2119. https://doi.org/10.1063/1.121294
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