An efficient and reliable simulator has been developed which solves the Poisson, continuity, and Schrödinger equations self-consistently to obtain the current-density–voltage characteristics of n-type semiconductor field emitters of electrons. The one-dimensional simulator takes into account the multidimensional geometry dependent-field variation near the semiconductor tip. The results obtained show the effects of the semiconductor parameters such as electron affinity, effective mass, mobility, and dielectric constant on the emission characteristics. The doping concentration is found to have a strong influence on the emitted current. The emission characteristics show deviations from linearity in a Fowler–Nordheim-type plot especially at high currents.

1.
C. A.
Spindt
,
C. E.
Holland
,
A.
Rosengreen
, and
I.
Brodie
,
J. Vac. Sci. Technol. B
11
,
468
(
1993
).
2.
H. S.
Uh
,
S. J.
Kwon
, and
D. K.
Lee
,
J. Vac. Sci. Technol. B
15
,
472
(
1997
).
3.
L. G.
Il’chenko
and
Yu. V.
Kryuchenko
,
J. Vac. Sci. Technol. B
13
,
566
(
1995
).
4.
K. L.
Jensen
,
J. Vac. Sci. Technol. B
13
,
505
(
1995
).
5.
Blue Screen GmbH, Computer Code ELFI (Zum Söhler 48, D-57076, Siegen, Germany, 1993).
6.
P. H.
Cutler
,
J.
He
,
N. M.
Miskovsky
,
T. E.
Sullivan
, and
B.
Weiss
,
J. Vac. Sci. Technol. B
11
,
387
(
1993
).
7.
H. G.
Kosmahl
,
IEEE Trans. Electron Devices
38
,
1534
(
1991
).
8.
S. Selberherr, Analysis and Simulation of Semiconductor Devices (Springer, Wien, 1984).
9.
A.
Sigurdardottir
,
V.
Krozer
, and
H. L.
Hartnagel
,
Appl. Phys. Lett.
67
,
3313
(
1995
).
10.
K. F.
Brennan
and
C. J.
Summers
,
J. Appl. Phys.
61
,
614
(
1987
).
11.
S. M. Sze, Physics of Semiconductor Devices, 2nd ed. (Wiley, New York, 1981), p. 250.
12.
R.
Tsu
and
L.
Esaki
,
Appl. Phys. Lett.
22
,
562
(
1973
).
13.
K.
Yokoo
,
S.
Sato
,
G.
Koshita
,
I.
Amano
,
J.
Murota
, and
S.
Ono
,
J. Vac. Sci. Technol. B
12
,
801
(
1994
).
14.
S.
Vatannia
,
G.
Gildenblat
, and
J.
Schiano
,
J. Appl. Phys.
82
,
902
(
1997
).
This content is only available via PDF.
You do not currently have access to this content.