Breakdown voltages of a capacitively coupled radio frequency nitrogen discharge at 13.56 MHz are measured using an insulated electrode system made from glass-covered aluminum disk plates. The breakdown voltages measured against the gas pressure exhibit typical V-shaped characteristics without peculiar sharp bend in the left branch of the minimum of the curve appearing in a low pressure region when metal electrodes are employed. The observed results are compared with the theoretical calculation based on the electron diffusion and mobility-controlled model, and a satisfactory agreement is found except for the precise prediction of the location of the minimum point.
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Research Article| December 08 1997
Breakdown measurement of a capacitive radio frequency discharge with insulated electrode
Masafumi Shoji, Masumi Sato; Breakdown measurement of a capacitive radio frequency discharge with insulated electrode. Appl. Phys. Lett. 8 December 1997; 71 (23): 3362–3363. https://doi.org/10.1063/1.120337
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