The development of the ordered channel array in the anodic porous alumina was initiated by the textured pattern of the surface made by the molding process, and growth of an almost defect-free channel array can be achieved throughout the textured area. The long-range-ordered channel array with dimensions on the order of millimeters with a channel density of 1010cm−2 was obtained, and the aspect ratio was over 150. The master for molding could be used many times, which makes it possible to overcome problems in the conventional nanolithographic technique, such as low through-put and high cost.

1.
R. J.
Tonucci
,
B. L.
Justus
,
A. J.
Campillo
, and
C. E.
Ford
,
Science
258
,
783
(
1992
).
2.
T. W.
Whitney
,
J. S.
Jiang
,
P. C.
Searson
, and
C. L.
Chien
,
Science
261
,
1316
(
1993
).
3.
M.
Saito
,
M.
Kirihara
,
T.
Taniguchi
, and
M.
Miyagi
,
Appl. Phys. Lett.
55
,
607
(
1994
).
4.
D.
Routkevitch
,
T.
Bigioni
,
M.
Moiskovits
, and
J. M.
Xu
,
J. Phys. Chem.
100
,
14037
(
1996
).
5.
J. P.
O’Sullivan
and
G. C.
Wood
,
Proc. R. Soc. London, Ser. A
317
,
511
(
1970
).
6.
H.
Masuda
and
K.
Fukuda
,
Science
268
,
1466
(
1995
).
7.
H.
Masuda
,
F.
Hasegawa
, and
S.
Ono
,
J. Electrochem. Soc.
144
,
L127
(
1997
).
8.
In the case of Al with the array of concaves which is naturally formed by selective removal of the oxide film after constant voltage anodization, concaves can induce the development of the pores in the initial stage of the second anodization process at constant voltage identical to that in first anodizing. See
H.
Masuda
and
M.
Satoh
,
Jpn. J. Appl. Phys., Part 2
35
,
L126
(
1996
).
9.
S. Y.
Chou
,
P. R.
Kraus
, and
P. J.
Renstrom
,
Science
272
,
85
(
1996
).
10.
V.
Lehman
and
H.
Foll
,
J. Electrochem. Soc.
137
,
653
(
1990
).
11.
H.
Masuda
,
K.
Nishio
, and
N.
Baba
,
Jpn. J. Appl. Phys., Part 2
31
,
L1775
(
1992
).
12.
H.
Masuda
,
K.
Nishio
, and
N.
Baba
,
Thin Solid Films
223
,
1
(
1993
).
13.
P.
Hoyer
,
N.
Baba
, and
H.
Masuda
,
Appl. Phys. Lett.
66
,
2700
(
1995
).
14.
P.
Hoyer
and
H.
Masuda
,
J. Mater. Sci. Lett.
15
,
1228
(
1996
).
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