The capability of misfit dislocations to generate nanostructures in the bulk of Si1−xGex/Si heteroepitaxial systems is demonstrated. It is shown that dislocation slip originating from compositionally graded Si1−xGex layers can produce a range of low-dimensional structures including nanowires, nanodots, and mosaic superlattices. Formation of the nanostructures is achieved in parallel processing, through a simple two-step cycle which includes growth of layered planar structures and postgrowth annealing.

1.
P. Hirth and J. Lothe, Theory of Dislocations, 2nd ed. (Krieger, Malabar, FL, 1992).
2.
J. P.
Peyrade
,
F.
Voillot
,
M.
Goiran
,
H.
Atmani
,
A.
Rocher
, and
E.
Bedel
,
Appl. Phys. Lett.
60
,
2481
(
1992
);
L.
Ressier
,
F.
Voillot
,
M.
Goiran
,
J. P.
Peyrade
, and
C.
Vieu
,
J. Appl. Phys.
79
,
8298
(
1996
).
3.
S. Yu.
Shiryaev
,
F.
Jensen
,
J.
Wulff Petersen
,
J.
Lundsgaard Hansen
, and
A.
Nylandsted Larsen
,
J. Cryst. Growth
157
,
132
(
1995
).
4.
E. A.
Fitzgerald
,
Mater. Sci. Rep.
7
,
87
(
1991
).
5.
S. Yu.
Shiryaev
,
J.
Lundsgaard Hansen
,
A.
Nylandsted Larsen
,
F.
Jensen
, and
J.
Wulff Petersen
,
Phys. Rev. B
52
,
15881
(
1995
).
6.
M.
Fyhn
,
S. Yu.
Shiryaev
,
A.
Nylandsted Larsen
, and
J.
Lundsgaard Hansen
,
Mater. Res. Soc. Symp. Proc.
373
,
505
(
1995
).
7.
F. K.
LeGoues
,
P. M.
Mooney
, and
J. O.
Chu
,
Appl. Phys. Lett.
62
,
140
(
1993
).
8.
A.
Wakahara
,
T.
Nasegawa
,
K.
Kuramoto
,
K.
Koc Vong
, and
A.
Sasaki
,
Appl. Phys. Lett.
64
,
1850
(
1994
).
9.
A dictionary definition of a machine is “any system, usually of rigid bodies, formed and connected to alter, transmit, and direct applied forces in a predetermined manner to accomplish a specific objective, such as the performance of useful work” [K. E. Drexler, Engines of Creation (Anchor, New York, 1986)].
This content is only available via PDF.
You do not currently have access to this content.