A direct measurement of atomic flux in e-beam evaporated yttrium has been demonstrated with a diode-laser-based atomic absorption (AA) monitor at 668 nm. Atomic number density and velocity were measured through absorption and Doppler shift measurements to provide the atomic flux. The AA-based deposition rates were compared with independent quartz crystal monitors showing agreement between the two methods.

Topics
Doppler effect, Crystalline solids, Electron beams, Lasers, Transition metals
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© 1997 American Institute of Physics.
1997
American Institute of Physics
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