Experimental results are presented on the modification of the valence band of diamond under a KrF excimer laser etching in the process of the activation of a diamond film surface for electroless copper plating. The Auger electron spectroscopy (AES) is used to obtain the valence‐band density‐of‐states spectra of the diamond film before and after laser treatment. According to AES data, a characteristic feature of the laser‐treated diamond surface is the appearance of nonzero density of states in the gap of diamond which promotes the electron transfer from the reducing agent to the metal ion during electroless deposition. The results are also discussed on the electroless metallization of diamond films under a load‐induced activation of the film surface with a diamond indentor.

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