Artificial superlattices consisting of antiferroelectric PbZrO3 (PZO) and ferroelectric PbTiO3 (PTO) have been fabricated by a multi‐ion‐beam sputtering technique. The epitaxial PZO and PTO layers were sequentially grown on (100)Pt/MgO substrates at a low substrate temperature of 415 °C with a periodicity from 5 to 100 perovskite unit cells. X‐ray diffraction studies revealed the superlattice structures with a‐axis oriented PTO layers on a‐axis oriented PZO layers. The dielectric and ferroelectric properties of the superlattice films were enhanced with increasing periodicity.

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