UV spectroscopy has been used as an in situ diagnostic to measure the gas phase concentration of 2,2,6,6‐tetramethyl‐3,5‐heptanedionate (thd) complexes of Cu and Y in metalorganic chemical vapor deposition (MOCVD) bubbler effluent. These Cu and Y precursors for MOCVD synthesis of YBa2Cu3O7−δ (YBCO) show marked instability in gas phase concentration as a function of time during the initial bubbler purge. The precursors show ideal behavior as predicted by the Clausius–Clapeyron relation. The UV diagonstic technique has the potential of controlling precursor concentration for MOCVD fabrication of high‐temperature superconducting thin films.

1.
J. G.
Bednorz
and
K. A.
Muller,
Z. Phys. B
64
,
189
(
1986
).
Google Scholar
 
2.
M.
Leskelä,
H.
Mölsä
, and
L.
Niinistö,
Supercond. Sci. Technol.
6
,
627
(
1993
).
Google Scholar
 
3.
J.
Zhao,
Y. Q.
Li,
C. S.
Chern,
P.
Lu,
P.
Norris,
B.
Gallois,
B.
Kear,
F.
Cosandey,
X. D.
Wu,
R. E.
Muenchausen
, and
S. M.
Garrison,
Appl. Phys. Lett.
59
,
1254
(
1991
).
Google Scholar
 
4.
H.
Busch,
A.
Fink
, and
A.
Muller,
J. Appl. Phys.
70
,
2449
(
1991
).
Google Scholar
 
5.
R.
Hiskes,
S. A.
DiCarolis,
J. L.
Young,
S. S.
Laderman,
R. D.
Jacowitz
, and
R. C.
Taber,
Appl. Phys. Lett.
59
,
606
(
1991
).
Google Scholar
 
6.
R.
Sato,
K.
Takahashi,
M.
Yoshino,
H.
Kato
, and
S.
Ohshima,
Jpn. J. Appl. Phys.
32
,
1590
(
1993
).
Google Scholar
 
7.
S. H.
Kim,
C. H.
Cho,
K. S.
No
, and
J. S.
Chun,
J. Mater. Res.
6
,
704
(
1991
).
Google Scholar
 
8.
S.
Matsuno,
F.
Uchikawa
, and
K.
Yoshizaki,
Jpn. J. Appl. Phys.
29
,
947
(
1990
).
Google Scholar
 
9.
D. L. Schulz, B. J. Hinds, D. A. Neumayer, C. L. Stern, and T. J. Marks, Chem. Mater. 5, 1605 (1993).
10.
B. J.
Hinds,
D. L.
Schulz,
D. A.
Neumayer,
B.
Han,
T. J.
Marks,
Y. Y.
Wang,
V. P.
Dravid,
J. L.
Schindler,
T. P.
Hogan
, and
C. R.
Kannewurf,
Appl. Phys. Lett.
65
,
231
(
1994
).
Google Scholar
 
11.
J.
Zhang,
R. A.
Gardiner,
P. S.
Kirlin,
R. W.
Boerstler
, and
J.
Steinbeck,
Appl. Phys. Lett.
61
,
2884
(
1992
).
Google Scholar
 
12.
J. P. Stagg, Chemtronics 3, 44 (1988).
13.
B. R.
Butler
and
J. P.
Stagg,
J. Cryst. Growth
94
,
481
(
1989
).
Google Scholar
 
14.
J. P.
Stagg,
J.
Christer,
E. J.
Thrush
, and
J.
Crawley,
J. Cryst. Growth
120
,
98
(
1992
).
Google Scholar
 
15.
E. Smith (private communication).
16.
G. A.
Hebner,
K. P.
Kileen
, and
R. M.
Biefeld,
J. Cryst. Growth
98
,
293
(
1989
).
Google Scholar
 
17.
Analysis consistent with formulation Y(thd)3(H2O)⁠. Vide infra.
18.
R. H.
Holm
and
F. A.
Cotton,
J. Am. Chem. Soc.
80
,
5658
(
1958
).
Google Scholar
 
19.
J. P.
Fackler,
F. A.
Cotton
, and
D. W.
Barnum,
Inorg. Chem.
2
,
97
(
1963
).
Google Scholar
 
20.
H.
Harima,
H.
Ohnishi,
K.
Hanaoka,
K.
Tachibana
, and
Y.
Goto,
Jpn. J. Appl. Phys.
30
,
1946
(
1991
).
Google Scholar
 
21.
S.
Yuhya,
K.
Kikuchi,
M.
Yoshida,
K.
Sugawara
, and
Y.
Shiohara,
Mol. Cryst. Liq. Cryst.
184
,
231
(
1990
).
Google Scholar
 
22.
H.
Busch,
A.
Fink,
A.
Müller
, and
K.
Samwer,
Supercond. Sci. Technol.
6
,
42
(
1992
).
Google Scholar
 
23.
K. Chou and G. Tsai, Thermochimica. Acta 240, 129 (1994).
24.
A. Gleizes, S. Sans-Lenain, D. Medus, N. Hovnanian, P. Miele, and J. D. Foulon, Inorg. Chim. Acta 209, 47 (1993).
25.
W. Rees (private communication).
26.
E. Waffenschmidt, J. Musolf, M. Heuken, and K. Heime, J. Supercond. 5, 119 (1992).
27.
R.
Amano,
A.
Sato
, and
S.
Suzuki,
Bull. Chem. Soc. Jpn.
54
,
1368
(
1981
).
Google Scholar
 
This content is only available via PDF.
© 1996 American Institute of Physics.
1996
American Institute of Physics
You do not currently have access to this content.