We describe a technique for creating a thin polystyrene film containing a periodic array of cylindrical holes, with a hole size of approximately 13 nm and a lattice constant of 27 nm. The starting material is a polystyrene‐polybutadiene diblock copolymer, which self‐assembles into a hexagonally packed array of polybutadiene cylinders embedded in a polystyrene matrix. A technique described previously is used to orient the cylinders normal to the plane of the film. The polybutadiene domains are then removed by reaction with ozone, which attacks the double bonds in the polybutadiene backbone. Films of this type could potentially be used as templates for nanolithography on a scale not readily accessed by other techniques.

1.
D.
Weiss,
M. L.
Roukes,
A.
Menschig,
P.
Grambow,
K.
Von Klitzing
, and
G.
Weimann,
Phys. Rev. Lett.
66
,
2790
(
1991
).
Google Scholar
 
2.
W.
Kang,
H. L.
Stormer,
L. N.
Pfeiffer,
K. W.
Baldwin
, and
K. W.
West,
Phys. Rev. Lett.
23
,
3850
(
1993
).
Google Scholar
 
3.
W. D. Volkmuth and R. H. Austin, Nature 358, 600 (1992); W. D. Volkmuth, T. Duke, M. C. Wu, R. H. Austin, and Attila Szabo, Phys. Rev. Lett. 72, 2117 (1994).
4.
M. H.
Kryder,
Thin Solid Films
216
,
174
(
1992
).
Google Scholar
 
5.
H. W.
Deckman
and
J. H.
Dunsmuir,
Appl. Phys. Lett.
41
,
377
(
1982
).
Google Scholar
 
6.
H. Fang, R. Zeller, and P. J. Stiles, Appl. Phys. Lett. 55, 1433 (1989); H. Fang and P. J. Stiles, Phys. Rev. B 41, 10171 (1990).
7.
R. J.
Tonucci,
B. L.
Justus,
A. J.
Campillo
, and
C. E.
Ford,
Science
258
,
738
(
1992
).
Google Scholar
 
8.
K. Douglas et al., Science 257, 642 (1992); G. Devaud and K. Douglas, J. Vac. Sci. Technol. B 11, 32 (1993).
9.
P. Mansky, P. M. Chaikin, and E. L. Thomas, J. Mater. Sci. 30, 1987 (!995); P. Mansky, P. M. Chaikin, M. Shayegan, and L. J. Fetters, Bull. Am. Phys. Soc. 36, 1051 (1991).
10.
T. L.
Morkved,
P.
Wiltzius,
H. M.
Jaeger,
D. G.
Grier
, and
T. A.
Witten,
Appl. Phys. Lett.
64
,
422
(
1994
).
Google Scholar
 
11.
F. S.
Bates,
Science
251
,
898
(
1991
).
Google Scholar
 
12.
C. S.
Hankee,
E. L.
Thomas
, and
L. J.
Fetters,
J. Mater. Sci.
23
,
1685
(
1988
).
Google Scholar
 
13.
S. H. Anastasiadis, T. P. Russell, S. K. Sajita, and C. F. Majkrzak, Phys. Rev. Lett. 62, 1852 (1989); T. P. Russell, G. Coulon, V. Deline, and P. F. Green, Macromolecules 22, 2581 (1989); T. P. Russell, G. Coulon, V. R. Deline, and D. C. Miller, Macromolecules 22, 4600 (1989).
14.
Y. Liu et al., Macromolecules 27, 4000 (1994).
15.
S. M. Troian and J. M. Drake (unpublished).
16.
K. Amundson, E. Helfand, D. D. Davis, X. Quan, S. S. Patel, and S. D. Smith, Macromolecules 24, 6546 (1991); K. Amundson, E. Helfand, X. Quan, S. D. Hudson, and S. D. Smith, Macromolecules 27, 6559 (1994).
17.
T. L. Morkved, M. Liu, H. M. Jaeger, P. Mansky, and T. P. Russell (unpublished).
18.
A. M. Mayes, D. G. Walton, G. J. Kellogg, T. P. Russell, and P. Lambooy, Macromolecules 27, 6225 (1994); G. J. Kellogg, D. G. Walton, A. M. Mayes, P. Lambooy, T. P. Russell, P. D. Gallagher, and S. K. Satija, Phys. Rev. Lett. (in press).
19.
M. A. van Dijk and R. van den Berg, Macromolecules 28, 6773 (1995).
20.
Available from Polysciences, Inc., 400 Valley Road, Warrington, PA, 18976, cat. No. 07298.
21.
Ozone Research and Equipment Corporation, 4953 West Missouri Avenue, Phoenix, AZ 85301-6100.
22.
P. S. Bailey, Ozonation in Organic Chemistry (Academic, New York, 1978); K. W. Ho, J. Polym. Sci. Part A: Polym. Chem. 24, 2467 (1986).
23.
J. S. Lee, A. Hirao, and S. Nakahama, Macromolecules 22, 2602 (1989).
24.
D. R.
Smith
and
D. J.
Meier,
Polymer
33
,
3777
(
1992
).
Google Scholar
 
25.
C. R.
Martin,
Science
266
,
1961
(
1994
).
Google Scholar
 
This content is only available via PDF.
© 1996 American Institute of Physics.
1996
American Institute of Physics
You do not currently have access to this content.