Potassium niobate (KNbO3) thin films and potassium niobate/tantalate (KNbO3/KTaO3) superlattices have been grown on KTaO3 (001) substrates by pulsed laser deposition. The thin‐film structures were analyzed by Rutherford backscattering/ion‐channeling techniques, x‐ray θ–2θ and Φ scans, and both conventional and Z‐contrast scanning transmission electron microscopy. Excellent film flatness and crystallinity are evidenced by these techniques. At room temperature, the KNbO3 films are characterized by an orthorhombic structure which differs from that of bulk KNbO3. The interfaces between the layers in the KNbO3/KTaO3 superlattice structures were found to be compositionally sharp on an atomic scale.

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