We have used transmission electron microscopy to determine the morphology of InP Stranski–Krastanow islands in GaInP, grown by metalorganic chemical vapor deposition at 580 °C. We investigated both capped and uncapped islands. It was found that the fully developed islands have the principal shape of truncated pyramids with a hexagonal base both before and after overgrowth. The planes defining the islands are of {001}, {110}, and {111} types. The base dimensions are 40–50 nm and 55–65 nm in the [1̄10] and [110] directions, respectively, and the height is 12–18 nm.

Topics
Transmission electron microscopy, Chemical vapor deposition, Semiconductors
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© 1995 American Institute of Physics.
1995
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