We report the observation of simultaneous lattice expansion and contraction in InP implanted with low‐energy protons, using the high‐resolution x‐ray rocking‐curve technique. For implantation with 260 keV, 1×1016 protons/cm2, the volume of the crystal extending from the surface to approximately 1.6 μm deep is contracted with a mean effective strain of −7×10−5, while the proton containing region is expanded to a maximum positive strain of about 7×10−4.

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© 1995 American Institute of Physics.
1995
American Institute of Physics
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